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Analysis of the Pattern Shapes Obtained By Micro/Nanospherical Lens Photolithography.
Yu, Guoxu; Ma, Yuan; Li, Xuan; Yu, Bowen; Zhang, Xinping; Zhang, Xuanhe; Chen, Yiqing; Liang, Zhenwei; Pang, Zuobo; Weng, Ding; Chen, Lei; Wang, Jiadao.
Affiliation
  • Yu G; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Ma Y; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Li X; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Yu B; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Zhang X; Beijing University of Civil Engineering and Architecture, Beijing 102616, P.R. China.
  • Zhang X; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Chen Y; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Liang Z; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Pang Z; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Weng D; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Chen L; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
  • Wang J; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P.R. China.
Langmuir ; 39(40): 14328-14335, 2023 Oct 10.
Article in En | MEDLINE | ID: mdl-37748943
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Full text: 1 Database: MEDLINE Language: En Year: 2023 Type: Article
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Full text: 1 Database: MEDLINE Language: En Year: 2023 Type: Article