Low-loss tantalum pentoxide photonics with a CMOS-compatible process.
Opt Express
; 32(7): 12291-12302, 2024 Mar 25.
Article
in En
| MEDLINE
| ID: mdl-38571056
ABSTRACT
We report a Ta2O5 photonic platform with a propagation loss of 0.49â
dB/cm at 1550â
nm, of 0.86â
dB/cm at 780â
nm, and of 3.76â
dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C-band for the first time to reveal the absorption loss of Ta2O5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta2O5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350°C, which is friendly to integration with active optoelectronic components.
Full text:
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Database:
MEDLINE
Language:
En
Year:
2024
Type:
Article