Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam.

Hirohata, Atsufumi; Yamamoto, Yasuaki; Murphy, Benedict A; Vick, Andrew J.

Afiliación

Hirohata A; Department of Electronics, University of York, Heslington, YO10 5DD York, UK.
Yamamoto Y; SM Business Unit, JEOL, Musashino 3-1-2, Akishima, Tokyo 196-8558, Japan.
Murphy BA; Department of Physics, University of York, Heslington, YO10 5DD York, UK.
Vick AJ; Department of Electronics, University of York, Heslington, YO10 5DD York, UK.

Nat Commun ; 7: 12701, 2016 09 02.

Article en En | MEDLINE | ID: mdl-27586090

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2016 Tipo del documento: Article

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2016 Tipo del documento: Article