Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs).

Parikh, Pritesh; Senowitz, Corey; Lyons, Don; Martin, Isabelle; Prosa, Ty J; DiBattista, Michael; Devaraj, Arun; Meng, Y Shirley.

Afiliación

Parikh P; Department of NanoEngineering, University of California San Diego, 9500 Gilman Drive, La Jolla, CA 92093, USA.
Senowitz C; Qualcomm Technologies, Inc., 5775 Morehouse Drive, San Diego, CA 92121, USA.
Lyons D; Qualcomm Technologies, Inc., 5775 Morehouse Drive, San Diego, CA 92121, USA.
Martin I; CAMECA Instruments, Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
Prosa TJ; CAMECA Instruments, Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
DiBattista M; Varioscale, Inc., 1782 La Costa Meadows Dr #103, San Marcos, CA 92078, USA.
Devaraj A; Physical and Computational Sciences Directorate, Pacific Northwest National Laboratory, P.O. Box 999, Richland, WA 99352, USA.
Meng YS; Department of NanoEngineering, University of California San Diego, 9500 Gilman Drive, La Jolla, CA 92093, USA.

Microsc Microanal ; 23(5): 916-925, 2017 10.

Article en En | MEDLINE | ID: mdl-28854989