Three-Dimensional in Situ Electron-Beam Lithography Using Water Ice.

Hong, Yu; Zhao, Ding; Liu, Dongli; Ma, Binze; Yao, Guangnan; Li, Qiang; Han, Anpan; Qiu, Min.

Afiliación

Hong Y; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.
Zhao D; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.
Liu D; Institute of Advanced Technology, Westlake Institute for Advanced Study , Westlake University , Hangzhou 310024 , PR China.
Ma B; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.
Yao G; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.
Li Q; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.
Han A; DTU Danchip/Cen , Technical University of Denmark , Kongens Lyngby 2800 , Denmark.
Qiu M; State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering , Zhejiang University , Hangzhou 310027 , PR China.

Nano Lett ; 18(8): 5036-5041, 2018 08 08.

Article en En | MEDLINE | ID: mdl-29940114