Dynamic pressure surface deformation measurement based on a chromatic confocal sensor.

ABSTRACT

To enable the real-time measurement of pressure deformations in sealed cavities, a high-precision method of detecting the deformation of a material surface is proposed. By combining a chromatic confocal displacement sensor with a pressure sensor, we can acquire dynamic online strain measurements that consider the effects of the deformed material and internal environmental conditions. A 90m m×90m m static mechanical cylindrical cavity is simulated using finite element software. The interior of the cylindrical cavity is continuously pressurized at up to 400 kPa with a material deformation of 300 µm. We experimentally obtain the spectral peak wavelengths corresponding to the surface deformation experiment, record the spectral data at 20 kPa intervals, and use the Voigt fitting algorithm to reduce sensor errors. The results show that the experimental results differ from the simulated results by 1.43 µm, with a relative error of 0.083% after sequential pressurization and depressurization using a pressure calibrator, and the uncertainty error of pressure deformation measurement is 1.495 µm. Thus, the proposed method is robust against external disturbances and is suitable for micrometer-level surface deformation monitoring, which has numerous applications in the high-precision inspection industry.