Targeted Positioning of Quantum Dots Inside 3D Silicon Photonic Crystals Revealed by Synchrotron X-ray Fluorescence Tomography.

Schulz, Andreas S; Harteveld, Cornelis A M; Vancso, G Julius; Huskens, Jurriaan; Cloetens, Peter; Vos, Willem L

Schulz, Andreas S; Harteveld, Cornelis A M; Vancso, G Julius; Huskens, Jurriaan; Cloetens, Peter; Vos, Willem L.

Afiliação

Schulz AS; Complex Photonic Systems (COPS), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Harteveld CAM; Molecular Nanofabrication (MNF), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Vancso GJ; Materials Science and Technology of Polymers (MTP), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Huskens J; Complex Photonic Systems (COPS), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Cloetens P; Materials Science and Technology of Polymers (MTP), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Vos WL; Molecular Nanofabrication (MNF), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.

ACS Nano ; 16(3): 3674-3683, 2022 Mar 22.

Article em En | MEDLINE | ID: mdl-35187934

Palavras-chave

3D integration; X-ray fluorescence imaging; complementary metal-oxide-semiconductor (CMOS); nanofabrication; photonic crystals; quantum dots

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Revista: ACS Nano Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Holanda