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1.
Opt Express ; 30(5): 7068-7081, 2022 Feb 28.
Artículo en Inglés | MEDLINE | ID: mdl-35299478

RESUMEN

In this contribution, we demonstrate the first referenceless measurement of a THz wavefront by means of shear-interferometry. The technique makes use of a transmissive Ronchi phase grating to generate the shear. We fabricated the grating by mechanical machining of high-density polyethylene. At the camera plane, the +1 and -1 diffraction orders are coherently superimposed, generating an interferogram. We can adjust the shear by selecting the period of the grating and the focal length of the imaging system. We can also alter the direction of the shear by rotating the grating. A gradient-based iterative algorithm is used to reconstruct the wavefront from a set of shear interferograms. The results presented in this study demonstrate the first step towards wavefield sensing in the terahertz band without using a reference wave.

2.
Opt Express ; 29(1): 385-399, 2021 Jan 04.
Artículo en Inglés | MEDLINE | ID: mdl-33362124

RESUMEN

We present a fast shape measurement of micro-parts based on depth discrimination in imaging with LED illumination. It is based on a 4f-setup with an electrically adjusted tunable lens at the common Fourier plane. Using such a configuration, the opportunity to implement a fast depth scan by means of a tunable lens without the requirement of mechanically moving parts and depth discrimination using the limited spatial coherence of LED illumination is investigated. The technique allows the use of limited spatially partially coherent illumination which can be easily adapted to the test object by selecting the geometrical parameters of the system accordingly. Using this approach, we demonstrate the approach by measuring the 3D form of a tilted optically rough surface and a cold-formed micro-cup. The approach is robust, fast since required images are captured in less than a second, and eye-safe and offers an extended depth of focus in the range of few millimetres. Using a step height standard, we determine a height error of ±1.75 µm (1σ). This value may be further decreased by lowering the spatial coherence length of the illumination or by increasing the numerical aperture of the imaging system.

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