RESUMEN
Lithium niobate (LN)-based metasurfaces have demonstrated remarkable potential in integrated electro-optically adjustable metadevices with the maturation of thin film LN on insulator (LNOI) technology. Here, we proposed a type of high Q factor tunable metasurface with etchless LN, which is electrically driven in the vertical direction by using transparent conductive film. A transmission amplitude modulation of over 60 dB at a voltage of 20 V is realized through guided mode resonances created at the LN layer with a Q factor of 1320. Meanwhile, phase modulation is also realized with a reflective design by adding a gold layer at the bottom of the metasurface. With a gate voltage of 80 V, about 1.75π phase modulation is achieved while keeping reflection over 92%. Our proposed device achieves effective modulation of optical amplitude and phase in the near-infrared band, which lays a good foundation for the development of high performance LN-based active nanophotonic devices.