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Electrodeposition of Gold to Conformally Fill High Aspect Ratio Nanometric Silicon Grating Trenches: A Comparison of Pulsed and Direct Current Protocols.
Znati, Sami A; Chedid, Nicholas; Miao, Houxun; Chen, Lei; Bennett, Eric E; Wen, Han.
Afiliación
  • Znati SA; Imaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
  • Chedid N; Imaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
  • Miao H; Imaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
  • Chen L; Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899.
  • Bennett EE; Imaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
  • Wen H; Imaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
J Surf Eng Mater Adv Technol ; 5(4): 207-213, 2015 Oct.
Article en En | MEDLINE | ID: mdl-27042384
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Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: J Surf Eng Mater Adv Technol Año: 2015 Tipo del documento: Article
Texto completo
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Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: J Surf Eng Mater Adv Technol Año: 2015 Tipo del documento: Article