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Thin film absorption characterization by focus error thermal lensing.
Domené, Esteban A; Schiltz, Drew; Patel, Dinesh; Day, Travis; Jankowska, E; Martínez, Oscar E; Rocca, Jorge J; Menoni, Carmen S.
Afiliación
  • Domené EA; Laboratorio de Fotónica, Departamento de Física, Facultad de Ingeniería, UBA, Paseo Colón Av. Paseo Colón 850, C1063ACV Buenos Aires, Argentina.
  • Schiltz D; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
  • Patel D; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
  • Day T; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
  • Jankowska E; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
  • Martínez OE; Laboratorio de Fotónica, Departamento de Física, Facultad de Ingeniería, UBA, Paseo Colón Av. Paseo Colón 850, C1063ACV Buenos Aires, Argentina.
  • Rocca JJ; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
  • Menoni CS; Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
Rev Sci Instrum ; 88(12): 123104, 2017 Dec.
Article en En | MEDLINE | ID: mdl-29289227
A simple, highly sensitive technique for measuring absorbed power in thin film dielectrics based on thermal lensing is demonstrated. Absorption of an amplitude modulated or pulsed incident pump beam by a thin film acts as a heat source that induces thermal lensing in the substrate. A second continuous wave collimated probe beam defocuses after passing through the sample. Determination of absorption is achieved by quantifying the change of the probe beam profile at the focal plane using a four-quadrant detector and cylindrical lenses to generate a focus error signal. This signal is inherently insensitive to deflection, which removes noise contribution from point beam stability. A linear dependence of the focus error signal on the absorbed power is shown for a dynamic range of over 105. This technique was used to measure absorption loss in dielectric thin films deposited on fused silica substrates. In pulsed configuration, a single shot sensitivity of about 20 ppm is demonstrated, providing a unique technique for the characterization of moving targets as found in thin film growth instrumentation.

Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2017 Tipo del documento: Article

Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2017 Tipo del documento: Article