An in-situ method for protecting internal cracks/pores from ion beam damage and reducing curtaining for TEM sample preparation using FIB.

Zhong, Xiang Li; Haigh, Sarah J; Zhou, Xiaorong; Withers, Philip J.

Afiliación

Zhong XL; Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK; Henry Royce Institute, Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK. Electronic address: xl.zhong@manchester.ac.uk.
Haigh SJ; Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK.
Zhou X; Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK.
Withers PJ; Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK; Henry Royce Institute, Department of Materials, University of Manchester, Oxford Road, Manchester, M13 9PL, UK.

Ultramicroscopy ; 219: 113135, 2020 Dec.

Article en En | MEDLINE | ID: mdl-33129062

Palabras clave

FIB (Focused Ion Beam); Internal cracks and pores; Ion beam damage; Porous materials; Redeposition; TEM (Transmission Electron Microscope) sample preparation