Broad bandwidth air-coupled micromachined ultrasonic transducers for gas sensing.

Shanmugam, P; Iglesias, L; Michaud, J F; Alquier, D; Colin, L; Dufour, I; Certon, D.

Afiliación

Shanmugam P; GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France. Electronic address: priyadarshini.shanmugam@univ-tours.fr.
Iglesias L; IMS Laboratory UMR-CNRS 5218, University of Bordeaux, 351 cours de la libération, 33405 TALENCE Cedex, France. Electronic address: luis.iglesias-hernandez@u-bordeaux.fr.
Michaud JF; GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France. Electronic address: jean-francois.michaud@univ-tours.fr.
Alquier D; GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France. Electronic address: daniel.alquier@univ-tours.fr.
Colin L; GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France. Electronic address: laurent.colin@univ-tours.fr.
Dufour I; IMS Laboratory UMR-CNRS 5218, University of Bordeaux, 351 cours de la libération, 33405 TALENCE Cedex, France. Electronic address: isabelle.dufour@ims-bordeaux.fr.
Certon D; GREMAN Laboratory UMR-CNRS 7347, University of Tours, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS Cedex 2, France. Electronic address: dominique.certon@univ-tours.fr.

Ultrasonics ; 114: 106410, 2021 Jul.

Article en En | MEDLINE | ID: mdl-33761341