Lightweight Gas Sensor Based on MEMS Pre-Concentration and Infrared Absorption Spectroscopy Inside a Hollow Fiber.

Viola, Roberto; Liberatore, Nicola; Mengali, Sandro; Elmi, Ivan; Tamarri, Fabrizio; Zampolli, Stefano.

Afiliación

Viola R; Centro Ricerche Elettro Ottiche, 67100 L'Aquila, Italy.
Liberatore N; Centro Ricerche Elettro Ottiche, 67100 L'Aquila, Italy.
Mengali S; Centro Ricerche Elettro Ottiche, 67100 L'Aquila, Italy.
Elmi I; Institute for Microelectronics and Microsystems, Italian National Research Council CNR-IMM, 40129 Bologna, Italy.
Tamarri F; Institute for Microelectronics and Microsystems, Italian National Research Council CNR-IMM, 40129 Bologna, Italy.
Zampolli S; Institute for Microelectronics and Microsystems, Italian National Research Council CNR-IMM, 40129 Bologna, Italy.

Sensors (Basel) ; 23(5)2023 Mar 03.

Article en En | MEDLINE | ID: mdl-36905013