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Unleashing the Power of 2D MoS2: In Situ TEM Study of Its Potential as Diffusion Barriers in Ru Interconnects.
Feng, Ping-Hsuan; Hsiao, Kai-Yuan; Jhan, Dun-Jie; Chen, Yu-Lin; Keng, Pei Yuin; Chang, Shou-Yi; Lu, Ming-Yen.
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  • Feng PH; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Hsiao KY; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Jhan DJ; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Chen YL; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Keng PY; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Chang SY; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
  • Lu MY; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
ACS Appl Mater Interfaces ; 15(41): 48543-48550, 2023 Oct 18.
Article en En | MEDLINE | ID: mdl-37792701
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Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2023 Tipo del documento: Article
Texto completo
Imprimir
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PubMed Links
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Texto completo: 1 Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2023 Tipo del documento: Article