RESUMEN
Some of the important issues of block copolymer (BCP) as an application to the potential low cost next generation lithography are thermal stability and deformation during pattern transfer process in addition to defect density, line edge/width roughness, etc. In this study, sulfur containing plasma treatment was used to modify the BCP and the effects of the plasma on the properties of plasma treated BCP were investigated. The polystyrene hole pattern obtained from polystyrene polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) was initially degraded when the polystyrene hole was annealed at 190 °C for 15 min. However, when the hole pattern was treated using sulfur containing plasmas using H2S or SF6 up to 2 min, possibly due to the sulfurization of the polystyrene hole surface, no change in the hole pattern was observed after the annealing even though there is a slight change in hole shapes during the plasma treatment. The optimized plasma treated polystyrene pattern showed the superior characteristics as the mask layer by showing better thermal stability, higher chemical inertness, and higher etch selectivity during plasma etching.
Asunto(s)
Sulfuro de Hidrógeno/química , Metacrilatos/química , Gases em Plasma/química , Poliestirenos/química , Azufre/química , Propiedades de SuperficieRESUMEN
An electrical biosensor exploiting a nanostructured semiconductor is a promising technology for the highly sensitive, label-free detection of biomolecules via a straightforward electronic signal. The facile and scalable production of a nanopatterned electrical silicon biosensor by block copolymer (BCP) nano-lithography is reported. A cost-effective and large-area nanofabrication, based on BCP self-assembly and single-step dry etching, is developed for the hexagonal nanohole patterning of thin silicon films. The resultant nanopatterned electrical channel modified with biotin molecules successfully detects the two proteins, streptavidin and avidin, down to nanoscale molarities (≈1 nm). The nanoscale pattern comparable to the Debye screening length and the large surface area of the three-dimensional silicon nanochannel enable excellent sensitivity and stability. A device simulation confirms that the nanopatterned structure used in this work is effective for biomolecule detection. This approach relying on the scalable self-assembly principle offers a high-throughput manufacturing process for clinical lab-on-a-chip diagnoses and relevant biomolecular studies.
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Técnicas Biosensibles , Nanoestructuras , Polímeros/química , Silicio/química , Microscopía Electrónica de RastreoRESUMEN
We present a thermally stable, mechanically compliant, and sensitive polymer-based NO2 gas sensor design. Interconnected nanoscale morphology driven from spinodal decomposition between conjugated polymers tethered with polar side chains and thermally stable matrix polymers offers judicious design of NO2-sensitive and thermally tolerant thin films. The resulting chemiresitive sensors exhibit stable NO2 sensing even at 170 °C over 6 h. Controlling the density of polar side chains along conjugated polymer backbone enables optimal design for coupling high NO2 sensitivity, selectivity, and thermal stability of polymer sensors. Lastly, thermally stable films are used to implement chemiresistive sensors onto flexible and heat-resistant substrates and demonstrate a reliable gas sensing response even after 500 bending cycles at 170 °C. Such unprecedented sensor performance as well as environmental stability are promising for real-time monitoring of gas emission from vehicles and industrial chemical processes.
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Calor , Dióxido de Nitrógeno , PolímerosRESUMEN
The outstanding flexible field emission properties of carbon hybrid films made of vertically aligned N-doped carbon nanotubes grown on mechanically compliant reduced graphene films are demonstrated. The bottom-reduced graphene film substrate enables the conformal coating of the hybrid film on flexible device geometry and ensures robust mechanical and electrical contact even in a highly deformed state. The field emission properties are precisely examined in terms of the control of the bending radius, the N-doping level, and the length or wall-number of the carbon nanotubes and analyzed with electric field simulations. This high-performance flexible carbon field emitter is potentially useful for diverse, flexible field emission devices.
Asunto(s)
Grafito/química , Nanotecnología/métodos , Nanotubos de Carbono/química , Polímeros/químicaRESUMEN
There has been strong demand for novel nonvolatile memory technology for low-cost, large-area, and low-power flexible electronics applications. Resistive memories based on metal oxide thin films have been extensively studied for application as next-generation nonvolatile memory devices. However, although the metal oxide based resistive memories have several advantages, such as good scalability, low-power consumption, and fast switching speed, their application to large-area flexible substrates has been limited due to their material characteristics and necessity of a high-temperature fabrication process. As a promising nonvolatile memory technology for large-area flexible applications, we present a graphene oxide based memory that can be easily fabricated using a room temperature spin-casting method on flexible substrates and has reliable memory performance in terms of retention and endurance. The microscopic origin of the bipolar resistive switching behavior was elucidated and is attributed to rupture and formation of conducting filaments at the top amorphous interface layer formed between the graphene oxide film and the top Al metal electrode, via high-resolution transmission electron microscopy and in situ X-ray photoemission spectroscopy. This work provides an important step for developing understanding of the fundamental physics of bipolar resistive switching in graphene oxide films, for the application to future flexible electronics.
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Equipos de Almacenamiento de Computador , Grafito/química , Membranas Artificiales , Óxidos/química , Procesamiento de Señales Asistido por Computador/instrumentación , Módulo de Elasticidad , Diseño de Equipo , Análisis de Falla de EquipoRESUMEN
A nanolithographic approach based on hierarchical peptide self-assembly is presented. An aromatic peptide of N-(t-Boc)-terminated triphenylalanine is designed from a structural motif for the beta-amyloid associated with Alzheimer's disease. This peptide adopts a turnlike conformation with three phenyl rings oriented outward, which mediate intermolecular pi-pi stacking interactions and eventually facilitate highly crystalline bionanosphere assembly with both thermal and chemical stability. The self-assembled bionanospheres spontaneously pack into a hexagonal monolayer at the evaporating solvent edge, constituting evaporation-induced hierarchical self-assembly. Metal nanoparticle arrays or embossed Si nanoposts could be successfully created from the hexagonal bionanosphere array masks in conjunction with a conventional metal-evaporation or etching process. Our approach represents a bionanofabrication concept that biomolecular self-assembly is hierarchically directed to establish a straightforward nanolithography compatible with conventional device-fabrication processes.
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Materiales Biocompatibles/química , Nanosferas/química , Nanotecnología/métodos , Péptidos/síntesis química , Fenilalanina/análogos & derivados , Fenilalanina/síntesis química , Nanosferas/ultraestructura , Tamaño de la Partícula , Péptidos/química , Fenilalanina/química , Espectrometría de Fluorescencia , Espectrofotometría Ultravioleta , Termogravimetría , Difracción de Rayos XRESUMEN
Omnidirectional deformability is an unavoidable basic requirement for wearable devices to accommodate human daily motion particularly at human joints. We demonstrate omnidirectionally bendable and stretchable textile-based electrochemical capacitor that retains high power performance under complex mechanical deformation. Judicious synergistic hybrid structure of woven elastic polymer yarns with carbon nanotubes and conductive polymers offers reliable electrical and electrochemical activity even under repeated cycles of severe complex deformation modes. The textile-based electrochemical capacitors exhibit omnidirectional stretchability with 93% of capacitance retention under repeated 50% omnidirectional stretching condition while demonstrating excellent specific capacitance (412 mF cm-2) and cycle stability (>2000 stretch). The wearable power source stably powers red LED under omnidirectional stretching that accompanies human elbow joint motion.
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Textiles , Capacidad Eléctrica , Humanos , Nanotubos de Carbono , PolímerosRESUMEN
We report a simple and convenient method for fabricating ordered porous structure in a polymeric thin film. A temporarily stabilized water-in-oil emulsion, where aqueous droplets were dispersed in the medium of polymer-organic solvent solution, was utilized for the preparation of porous structure. The water-in-oil emulsion was simply prepared by sonicating the mixture of water and polymer-organic solvent solution without any colloid stabilizer. The growth of aqueous droplets was profoundly retarded by dissolving a small amount of sucrose, selectively soluble in the dispersed phase. The prepared emulsion was recovered onto a substrate through dip-coating and subsequently air-dried to get a well-ordered porous polymer film. The polymer content in the polymer solution phase and the compositional ratio of the aqueous phase to the polymer solution phase was optimized to fabricate well-ordered structures.
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Benceno/química , Emulsiones/química , Membranas Artificiales , Polímeros/química , Tamaño de la Partícula , Porosidad , Agua/químicaRESUMEN
Highly aligned metal nanowire arrays with feature sizes approaching 10 nm are fabricated. This is made possible by the self-assembly of block copolymers (BCPs) on graphene-wrinkle arrays. Thickness-modulated BCP films confined on the wrinkled reduced graphene oxide (rGO) surface promote the strict alignment of the self-assembled BCP lamellae in the direction of the film thickness gradient.
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Fenómenos Mecánicos , Nanotecnología/instrumentación , Nanocables/química , Polímeros/química , Análisis Costo-Beneficio , Grafito/química , Nanotecnología/economíaRESUMEN
Graphene is a promising candidate to complement brittle and expensive transparent conducting oxides. Nevertheless, previous research efforts have paid little attention to reduced graphene, which can be of great benefit due to low-cost solution processing without substrate transfer. Here we demonstrate workfunction-tunable, highly conductive, N-doped reduced graphene film, which is obtainable from the spin-casting of graphene oxide dispersion and can be successfully employed as a transparent cathode for high-performance polymer light-emitting diodes (PLEDs) as an alternative to fluorine-doped tin oxide (FTO). The sheet resistance of N-doped reduced graphene attained 300 Ω/â¡ at 80% transmittance, one of the lowest values ever reported from the reduction of graphene oxide films. The optimal doping of quaternary nitrogen and the effective removal of oxygen functionalities via sequential hydrazine treatment and thermal reduction accomplished the low resistance. The PLEDs employing N-doped reduced graphene cathodes exhibited a maximum electroluminescence efficiency higher than those of FTO-based devices (4.0 cd/A for FTO and 7.0 cd/A for N-doped graphene at 17,000 cd/m(2)). The reduced barrier for electron injection from a workfunction-tunable, N-doped reduced graphene cathode offered this remarkable device performance.
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Electrodos , Grafito/química , Iluminación/instrumentación , Nanoestructuras/química , Polímeros/química , Semiconductores , Diseño de Equipo , Análisis de Falla de Equipo , Nanoestructuras/ultraestructura , Tamaño de la PartículaRESUMEN
Mussel-inspired interfacial engineering is synergistically integrated with block copolymer (BCP) lithography for the surface nanopatterning of low surface energy substrate materials, including, Teflon, graphene, and gold. The image shows the Teflon nanowires and their excellent superhydrophobicity.
Asunto(s)
Oro/química , Grafito/química , Nanoestructuras/química , Politetrafluoroetileno/química , Impresión/métodos , Adhesivos , Interacciones Hidrofóbicas e Hidrofílicas , Tamaño de la Partícula , Propiedades de SuperficieRESUMEN
Well-aligned nanopatterns of various serum, antithrombogenic and cell adhesive proteins, such as gamma-globulin, fibrinogen, thrombomodulin, fibronectin and type I collagen, were fabricated on a highly-oriented block copolymer lamellar surface, and these bioactive protein nanoarrays will be useful in biological research.