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High-Fidelity, Sub-5 nm Patterns from High-χ Block Copolymer Films with Vapor-Deposited Ultrathin, Cross-Linked Surface-Modification Layers.
Wang, Hyun Suk; Oh, Seula; Choi, Junhwan; Jang, Wontae; Kim, Ki Hyun; Arellano, Carlos Luis; Huh, June; Bang, Joona; Im, Sung Gap.
Afiliação
  • Wang HS; Department of Chemical and Biological Engineering, Korea University, Seoul, 02841, Republic of Korea.
  • Oh S; Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
  • Choi J; Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
  • Jang W; Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
  • Kim KH; Department of Chemical and Biological Engineering, Korea University, Seoul, 02841, Republic of Korea.
  • Arellano CL; Faculty of Pharmacy and Pharmaceutical Sciences, Monash University, 381 Royal Parade, Parkville, VIC 3052, Australia.
  • Huh J; Department of Chemical and Biological Engineering, Korea University, Seoul, 02841, Republic of Korea.
  • Bang J; Department of Chemical and Biological Engineering, Korea University, Seoul, 02841, Republic of Korea.
  • Im SG; Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
Macromol Rapid Commun ; 41(4): e1900514, 2020 Feb.
Article em En | MEDLINE | ID: mdl-31958190
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Texto completo: 1 Base de dados: MEDLINE Assunto principal: Polímeros / Nanoestruturas Idioma: En Revista: Macromol Rapid Commun Ano de publicação: 2020 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Assunto principal: Polímeros / Nanoestruturas Idioma: En Revista: Macromol Rapid Commun Ano de publicação: 2020 Tipo de documento: Article