RESUMEN
Structural, chemical and electronic properties of electroforming in the TiN/HfO(2) system are investigated at the nanometre scale. Reversible resistive switching is achieved by biasing the metal oxide using conductive atomic force microscopy. An original method is implemented to localize and investigate the conductive region by combining focused ion beam, scanning spreading resistance microscopy and scanning transmission electron microscopy. Results clearly show the presence of a conductive filament extending over 20 nm. Its size and shape is mainly tuned by the corresponding HfO(2) crystalline grain. Oxygen vacancies together with localized states in the HfO(2) band gap are highlighted by electron energy loss spectroscopy. Oxygen depletion is seen mainly in the central part of the conductive filament along grain boundaries. This is associated with partial amorphization, in particular at both electrode/oxide interfaces. Our results are a direct confirmation of the filamentary conduction mechanism, showing that oxygen content modulation at the nanometre scale plays a major role in resistive switching.
RESUMEN
NiO films display unipolar resistance switching characteristics, due to the electrically induced formation and rupture of nanofilaments. While the applicative interest for possible use in highly dense resistance switching memory (RRAM) is extremely high, switching phenomena pose strong fundamental challenges in understanding the physical mechanisms and models. This work addresses the set and reset mechanisms for the formation and rupture of nanofilaments in NiO RRAM devices. Reset is described in terms of thermally-accelerated diffusion and oxidation processes, and its resistance dependence is explained by size-dependent Joule heating and oxidation. The filament is described as a region with locally-enhanced doping, resulting in an insulator-metal transition driven by structural and chemical defects. The set mechanism is explained by a threshold switching effect, triggering chemical reduction and a consequent local increase of metallic doping. The possible use of the observed resistance-dependent reset and set parameters to improve the memory array operation and variability is finally discussed.