RESUMEN
Sensing displacements at the nanoscale is the basis for many metrology applications, in particular atomic-force microscopy. Displacement sensing with nano-optomechanical structures provides interesting opportunities for integration, but it typically features a small dynamic range due to the near-field nature of the sensor-sample interaction. Here, a far-field sensing approach based on a grating coupler is considered and an analytical model used to tune its performance is introduced. The proposed model allows exploiting the full range of design parameters and thereby optimizing resolution and dynamic range. The compact size of the sensor and the possibility of integrating it with an on-chip laser and detector make it very promising for fully-integrated optical sensing systems.
RESUMEN
The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.