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Development of in situ optical-electrical MEMS platform for semiconductor characterization.
Cai, Songhua; Gu, Chenyi; Wei, Yifan; Gu, Min; Pan, Xiaoqing; Wang, Peng.
Afiliación
  • Cai S; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
  • Gu C; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
  • Wei Y; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
  • Gu M; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.
  • Pan X; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China; Department of Chemical Engineering and Materials Science and Department of Physics and Astronomy
  • Wang P; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. Electronic address: wangpeng@nju.edu.cn.
Ultramicroscopy ; 194: 57-63, 2018 11.
Article en En | MEDLINE | ID: mdl-30092390
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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Ultramicroscopy Año: 2018 Tipo del documento: Article País de afiliación: China
Texto completo
Imprimir
XML
PubMed Links
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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Ultramicroscopy Año: 2018 Tipo del documento: Article País de afiliación: China