Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser.

Elloian, Jeffrey; Sherman, Jeffrey; Costa, Tiago; Shi, Chen; Shepard, Kenneth.

Afiliación

Elloian J; Department of Electrical Engineering, Columbia University, 500 W 120th St., New York, New York 10027.
Sherman J; Department of Electrical Engineering, Columbia University, 500 W 120th St., New York, New York 10027.
Costa T; Department of Electrical Engineering, Columbia University, 500 W 120th St., New York, New York 10027.
Shi C; Department of Electrical Engineering, Columbia University, 500 W 120th St., New York, New York 10027.
Shepard K; Department of Electrical Engineering, Columbia University, 500 W 120th St., New York, New York 10027.

J Vac Sci Technol A ; 38(3): 033202, 2020 May.

Article en En | MEDLINE | ID: mdl-32226219

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: J Vac Sci Technol A Año: 2020 Tipo del documento: Article

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: J Vac Sci Technol A Año: 2020 Tipo del documento: Article