Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate.

Lee, Jun-Myeong; Lee, Jong-Chan; Kim, Seong-In; Lee, Seung-Jae; Bae, Jae-Yung; Park, Jin-Hyung; Park, Jea-Gun.

Afiliación

Lee JM; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, Korea.
Lee JC; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, Korea.
Kim SI; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, Korea.
Lee SJ; Department of Electronic Engineering, Hanyang University, Seoul 04763, Korea.
Bae JY; Department of Energy Engineering, Hanyang University, Seoul 04763, Korea.
Park JH; UB Materials Inc., Yongin 17162, Korea.
Park JG; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 04763, Korea.

Nanomaterials (Basel) ; 12(6)2022 Mar 15.

Article en En | MEDLINE | ID: mdl-35335782