The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and <i>ab initio</i> molecular dynamics study.

Park, Hwanyeol; Woo, Daekwang; Lee, Jong Myeong; Park, Se Jun; Lee, Sungwoo; Kim, Ho Jun; Yoon, Euijoon; Lee, Gun-Do

The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and ab initio molecular dynamics study.

Park, Hwanyeol; Woo, Daekwang; Lee, Jong Myeong; Park, Se Jun; Lee, Sungwoo; Kim, Ho Jun; Yoon, Euijoon; Lee, Gun-Do.

Afiliación

Park H; Department of Materials Science and Engineering, Seoul National University Seoul 08826 Korea eyoon@snu.ac.kr gdlee@snu.ac.kr.
Woo D; Memory Thin Film Technology Team, Giheung Hwaseong Complex, Samsung Electronics 445-701 South Korea.
Lee JM; Memory Thin Film Technology Team, Giheung Hwaseong Complex, Samsung Electronics 445-701 South Korea.
Park SJ; Memory Thin Film Technology Team, Giheung Hwaseong Complex, Samsung Electronics 445-701 South Korea.
Lee S; Memory Thin Film Technology Team, Giheung Hwaseong Complex, Samsung Electronics 445-701 South Korea.
Kim HJ; Department of Materials Science and Engineering, Seoul National University Seoul 08826 Korea eyoon@snu.ac.kr gdlee@snu.ac.kr.
Yoon E; Department of Mechanical Engineering, Dong-A University Busan 49315 South Korea.
Lee GD; Department of Materials Science and Engineering, Seoul National University Seoul 08826 Korea eyoon@snu.ac.kr gdlee@snu.ac.kr.

RSC Adv ; 10(12): 6822-6830, 2020 Feb 13.

Article en En | MEDLINE | ID: mdl-35493897

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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: RSC Adv Año: 2020 Tipo del documento: Article

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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: RSC Adv Año: 2020 Tipo del documento: Article