Numerical study of the plasmonic slab lens for improving direct-write nano lithography.

Plasmonic direct-write lithography (PDWL) provides a potential tool for the fabrication and manufacturing at the nano scale due to its high-resolution and low-cost. However, the shallow exposure depth hinders its practical application. Here, we incorporate the plasmonic slab lenses (PSLs) into PDWL to amplify and compensate evanescent waves, leading to improved light intensity, depth, resolution and better tolerance to the air gap beyond the near field optical lithography. Two typical plasmonic probes with different nanostructure and localized plasmonic resonance mechanisms are designed and fabricated as representatives, the local intensity enhancement of which mainly depend on the oscillations of transverse and longitudinal electric field components, respectively. Optimizations considering the PSL structure, material and the illuminating wavelength are performed to amplify different field components and figure out the best lithography configuration. Simulation results indicate that Ag-Ag cavity PSL and 355 nm illumination is the best combination for the lithography with bowknot aperture probe, while the semi-ring probe exhibits better performance under the condition of Ag-Al cavity PSL and 405 nm illumination. The semi-ring probe in combination with a plasmonic cavity, for instance, is demonstrated to enhance the light intensity by 4 times at the bottom layer of the photoresist compared to that without PSL and realize a lithography resolution of 23 nm. Our scheme is believed to boost the application of PDWL as a high-resolution and low-cost nanofabrication technology, and it may even serve as an alternative for the high-cost scanning method, such as focused ion beam and electron beam lithography.

4.7 THz asymmetric beam multiplexer for GUSTO.

A full demonstration of the Fourier phase grating used as 4.7 THz local oscillator (LO) multiplexer for Galactic/Extragalactic ULDB Spectroscopic Terahertz Observatory (GUSTO) is presented in this paper, including its design, modeling, tolerance analysis, and experimental characterizations of the angular and intensity distributions among 2 × 4 output beams and the power efficiency. A quantum cascade laser (QCL) is used to generate the input beam for evaluation of the grating performance in its all relevant aspects with an accuracy level never reported before, where good agreements with modeling results are found. This is the first asymmetric-profile grating fully modelled and characterized at a THz frequency, that further confirms the versatility of this technology for providing an intermediate optical element for feeding multiple array detectors with a single radiation source at such a scientifically interesting frequency regime.

3.9 THz spatial filter based on a back-to-back Si-lens system.

We present a terahertz spatial filter consisting of two back-to-back (B2B) mounted elliptical silicon lenses and an opening aperture defined on a thin gold layer between the lenses. The beam filtering efficiency of the B2B lens system is investigated by simulation and experiment. Using a unidirectional antenna coupled 3rd-order distributed feedback (DFB) quantum cascade laser (QCL) at 3.86 THz as the source, the B2B lens system shows 72% transmissivity experimentally with a fundamental Gaussian mode as the input, in reasonably good agreement with the simulated value of 80%. With a proper aperture size, the B2B lens system is capable of filtering the non-Gaussian beam from the QCL to a nearly fundamental Gaussian beam, where Gaussicity increases from 74% to 99%, and achieves a transmissivity larger than 30%. Thus, this approach is proven to be an effective beam shaping technique for QCLs, making them to be suitable local oscillators in the terahertz range with a Gaussian beam. Besides, the B2B lens system is applicable to a wide frequency range if the wavelength dependent part is properly scaled.

81 supra-THz beams generated by a Fourier grating and a quantum cascade laser.

Large heterodyne receiver arrays (~100 pixel) allow astronomical instrumentations to map more area within limited space mission lifetime. One challenge is to generate multiple local oscillator (LO) beams. Here, we succeeded in generating 81 beams at 3.86 THz by combining a reflective, metallic Fourier grating with an unidirectional antenna coupled 3rd-order distributed feedback (DFB) quantum cascade laser (QCL). We have measured the diffracted 81 beams by scanning a single pyroelectric detector at a plane, which is in the far field for the diffraction beams. The measured output beam pattern agrees well with a simulated result from COMSOL Multiphysics, with respect to the angular distribution and power distribution among the 81 beams. We also derived the diffraction efficiency to be 94 ± 3%, which is very close to what was simulated for a manufactured Fourier grating (97%). For an array of equal superconducting hot electron bolometer mixers, 64 out of 81 beams can pump the HEB mixers with similar power, resulting in receiver sensitivities within 10%. Such a combination of a Fourier grating and a QCL can create an LO with 100 beams or more, enabling a new generation of large heterodyne arrays for astronomical instrumentation.