Ultralow-dielectric-constant amorphous boron nitride.

Decrease in processing speed due to increased resistance and capacitance delay is a major obstacle for the down-scaling of electronics1-3. Minimizing the dimensions of interconnects (metal wires that connect different electronic components on a chip) is crucial for the miniaturization of devices. Interconnects are isolated from each other by non-conducting (dielectric) layers. So far, research has mostly focused on decreasing the resistance of scaled interconnects because integration of dielectrics using low-temperature deposition processes compatible with complementary metal-oxide-semiconductors is technically challenging. Interconnect isolation materials must have low relative dielectric constants (κ values), serve as diffusion barriers against the migration of metal into semiconductors, and be thermally, chemically and mechanically stable. Specifically, the International Roadmap for Devices and Systems recommends4 the development of dielectrics with κ values of less than 2 by 2028. Existing low-κ materials (such as silicon oxide derivatives, organic compounds and aerogels) have κ values greater than 2 and poor thermo-mechanical properties5. Here we report three-nanometre-thick amorphous boron nitride films with ultralow κ values of 1.78 and 1.16 (close to that of air, κ = 1) at operation frequencies of 100 kilohertz and 1 megahertz, respectively. The films are mechanically and electrically robust, with a breakdown strength of 7.3 megavolts per centimetre, which exceeds requirements. Cross-sectional imaging reveals that amorphous boron nitride prevents the diffusion of cobalt atoms into silicon under very harsh conditions, in contrast to reference barriers. Our results demonstrate that amorphous boron nitride has excellent low-κ dielectric characteristics for high-performance electronics.

Ultrawide meta-film replication process for the mass production of a flexible microwave absorbing meta-surface.

The manufacturing process for an ultrawide flexible microwave absorbing meta-surface was developed and optimized experimentally. The developed replication process consists of four main steps to demonstrate double-square loop array meta-structures: (1) mechanical machining of a master mold, (2) soft mold replication and patterned film imprinting, (3) conductive ink blade filling, (4) lamination of a base flexible film to meta sheet. Based on experimental optimization of the individual steps, the manufacturing process for a large-area flexible meta-film was established successfully. The feasibility of a developed process has been demonstrated with a 200 mm × 500 mm fabricated meta-film with a focus on microwave absorbing uniformity in the X-band region.

Size-Dependent Inertial Focusing Position Shift and Particle Separations in Triangular Microchannels.

A recent study of inertial microfluidics within nonrectangular cross-section channels showed that the inertial focusing positions changes with cross-sectional shapes; therefore, the cross-sectional shape can be a useful control parameter for microfluidic particle manipulations. Here, we conducted detail investigation on unique focusing position shift phenomena, which occurs strongly in channels with the cross-sectional shape of the isosceles right triangle. The top focusing positions shift along the channel walls to the direction away from the apex with increasing Reynolds number and decreasing particle size. A larger particle with its center further away from the side walls experiences shear gradient lift toward the apex, which leads to an opposite result with changes of Reynolds and particle size. The focusing position shift and the subsequent stabilization of corner focusing lead to changes in the number of focusing positions, which enables a novel method for microparticle separations with high efficiency (>95%) and resolution (<2 µm). The separation method based on equilibrium focusing; therefore, the operation is simple and no complex separation optimization is needed. Moreover, the separation threshold can be easily modulated with flow rate adjustment. Rare cell separation from blood cell was successfully demonstrated with spiked MCF-7 cells in blood by achieving the yield of ∼95% and the throughput of ∼106 cells/min.

Melt-quenched carboxylate metal-organic framework glasses.

Although carboxylate-based frameworks are commonly used architectures in metal-organic frameworks (MOFs), liquid/glass MOFs have thus far mainly been obtained from azole- or weakly coordinating ligand-based frameworks. This is because strong coordination bonds of carboxylate ligands to metals block the thermal vitrification pathways of carboxylate-based MOFs. In this study, we present the example of carboxylate-based melt-quenched MOF glasses comprising Mg2+ or Mn2+ with an aliphatic carboxylate ligand, adipate. These MOFs have a low melting temperature (Tm) of 284 °C and 238 °C, respectively, compared to zeolitic-imidazolate framework (ZIF) glasses, and superior mechanical properties in terms of hardness and elastic modulus. The low Tm may be attributed to the flexibility and low symmetry of the aliphatic carboxylate ligand, which raises the entropy of fusion (ΔSfus), and the lack of crystal field stabilization energy on metal ions, reducing enthalpy of fusion (ΔHfus). This research will serve as a cornerstone for the integration of numerous carboxylate-based MOFs into MOF glasses.

Transmission-type photonic crystal structures for color filters.

A transmission-type structure based on woodpile photonic crystal layers is proposed for use in color filters. Selective bandpass filters for red, green, and blue wavelength bands are constructed using optimally designed multilayered woodpile photonic crystals. The R/G/B color filtering for a wide range of incidence angles of light is demonstrated numerically, and the operation principle and design method are described.

Manufacturing of stretchable substrate with biaxial strain control for highly-efficient stretchable solar cells and displays.

There has been significant research focused on the development of stretchable materials that can provide a large area with minimal material usage for use in solar cells and displays. However, most materials exhibit perpendicular shrinkage when stretched, which is particularly problematic for polymer-based substrates commonly used in stretchable devices. To address this issue, biaxial strain-controlled substrates have been proposed as a solution to increase device efficiency and conserve material resources. In this study, we present the design and fabrication of a biaxial strain-controlled substrate with a re-entrant honeycomb structure and a negative Poisson's ratio. Using a precisely machined mold with a shape error of less than 0.15%, we successfully fabricated polydimethylsiloxane substrates with a 500 µm thick re-entrant honeycomb structure, resulting in a 19.1% reduction in perpendicular shrinkage. This improvement translates to a potential increase in device efficiency by 9.44% and an 8.60% reduction in material usage for substrate fabrication. We demonstrate that this design and manufacturing method can be applied to the fabrication of efficient stretchable devices, such as solar cells and displays.

Graphene Antiadhesion Layer for the Effective Peel-and-Pick Transfer of Metallic Electrodes toward Flexible Electronics.

Owing to its exceptional physicochemical properties, graphene has demonstrated unprecedented potential in a wide array of scientific and industrial applications. By exploiting its chemically inert surface endowed with unique barrier functionalities, we herein demonstrate antiadhesive monolayer graphene films for realizing a peel-and-pick transfer process of target materials from the donor substrate. When the graphene antiadhesion layer (AAL) is inserted at the interface between the metal and the arbitrary donor substrate, the interfacial interactions can be effectively weakened by the weak interplanar van der Waals forces of graphene, enabling the effective release of the metallic electrode from the donor substrate. The flexible embedded metallic electrode with graphene AAL exhibited excellent electrical conductivity, mechanical durability, and chemical resistance, as well as excellent performance in flexible heater applications. This study afforded an effective strategy for fabricating high-performance and ultraflexible embedded metallic electrodes for applications in the field of highly functional flexible electronics.

Fabrication and characterization of resistive double square loop arrays for ultra-wide bandwidth microwave absorption.

Microwave absorbers using conductive ink are generally fabricated by printing an array pattern on a substrate to generate electromagnetic fields. However, screen printing processes are difficult to vary the sheet resistance values for different regions of the pattern on the same layer, because the printing process deposits materials at the same height over the entire surface of substrate. In this study, a promising manufacturing process was suggested for engraved resistive double square loop arrays with ultra-wide bandwidth microwave. The developed manufacturing process consists of a micro-end-milling, inking, and planing processes. A 144-number of double square loop array was precisely machined on a polymethyl methacrylate workpiece with the micro-end-milling process. After engraving array structures, the machined surface was completely covered with the developed conductive carbon ink with a sheet resistance of 15 Ω/sq. It was cured at room temperature. Excluding the ink that filled the machined double square loop array, overflowed ink was removed with the planing process to achieve full filled and isolated resistive array patterns. The fabricated microwave absorber showed a small radar cross-section with reflectance less than - 10 dB in the frequency band range of 8.0-14.6 GHz.

Inertial focusing in triangular microchannels with various apex angles.

We consider inertial focusing of particles in channels with triangular cross sections. The number and the location of inertial focusing positions in isosceles triangular channels can change with varying blockage ratios (a/H) and Reynolds numbers (Re). In triangular channels, asymmetric velocity gradient induced by the sloped sidewalls leads to changes in the direction and the strength of the inertial lift forces. Therefore, varying the configuration (specifically, angle) of the triangular cross section is expected to lead to a better understanding of the nature of the inertial lift forces. We fabricated triangular microchannels with various apex angles using channel molds that were shaped by a planing process, which provides precise apex angles and sharp corners. The focusing position shift was found to be affected by the channel cross section, as expected. It was determined that the direction of the focusing position shift can be reversed depending on whether the vertex is acute or obtuse. More interestingly, corner focusing modes and splitting of the corner focusing were observed with increasing Re, which could explain the origin of the inertial focusing position changes in triangular channels. We conducted fluid dynamic simulations to create force maps under various conditions. These force maps were analyzed to identify the basins of attraction of various attractors and pinpoint focusing locations using linear stability analysis. Calculating the relative sizes of the basins of attractions and exhaustively identifying the focusing positions, which are very difficult to investigate experimentally, provided us a better understanding of trends in the focusing mechanism.

Micromirror-Embedded Coverslip Assembly for Bidirectional Microscopic Imaging.

3D imaging of a biological sample provides information about cellular and subcellular structures that are important in cell biology and related diseases. However, most 3D imaging systems, such as confocal and tomographic microscopy systems, are complex and expensive. Here, we developed a quasi-3D imaging tool that is compatible with most conventional microscopes by integrating micromirrors and microchannel structures on coverslips to provide bidirectional imaging. Microfabricated micromirrors had a precisely 45° reflection angle and optically clean reflective surfaces with high reflectance over 95%. The micromirrors were embedded on coverslips that could be assembled as a microchannel structure. We demonstrated that this simple disposable device allows a conventional microscope to perform bidirectional imaging with simple control of a focal plane. Images of microbeads and cells under bright-field and fluorescent microscopy show that the device can provide a quick analysis of 3D information, such as 3D positions and subcellular structures.

Electrodeposited Silver Nanowire Transparent Conducting Electrodes for Thin-Film Solar Cells.

Silver nanowire (AgNW) networks have demonstrated high optical and electrical properties, even better than those of indium tin oxide thin films, and are expected to be a next-generation transparent conducting electrode (TCE). Enhanced electrical and optical properties are achieved when the diameter of the AgNWs in the network is fairly small, that is, typically less than 30 nm. However, when AgNWs with such small diameters are used in the network, stability issues arise. One method to resolve the stability issues is to increase the diameter of the AgNWs, but the use of AgNWs with large diameters has the disadvantage of causing a rough surface morphology. In this work, we resolve all of the aforementioned issues with AgNW TCEs by the electrodeposition of Ag onto as-spin-coated thin AgNW TCEs. The electrodeposition of Ag offers many advantages, including the precise adjustment of the AgNW diameter and wire-to-wire welding to improve the junction conductance while minimizing the increase in protrusion height because of the overlap of AgNWs upon increasing the diameter. In addition, Ag electrodeposition on AgNW TCEs can provide higher conductance than that of as-spin-coated AgNW TCEs at the same transparency because of the reduced junction resistance, which generates a superior figure of merit. We applied the electrodeposited (ED) AgNW network to a Cu(In,Ga)Se2 thin-film solar cell and compared the device performance to a device with a standard sputtered transparent conducting oxide (TCO). The cell fabricated by the electrodeposition method showed nearly equal performance to that of a cell with the sputtered TCO. We expect that ED AgNW networks can be used as high-performance and robust TCEs for various optoelectronic applications.

Selective crack suppression during deformation in metal films on polymer substrates using electron beam irradiation.

While cracks are usually considered detrimental, crack generation can be harnessed for various applications, for example in ceramic materials, via directing crack propagation and crack opening. Here, we find that electron beam irradiation prompts a crack suppression phenomenon in a copper (Cu) thin film on a polyimide substrate, allowing for the control of crack formation in terms of both location and shape. Under tensile strain, cracks form on the unirradiated region of the Cu film whereas cracks are prevented on the irradiated region. We attribute this to the enhancement of the adhesion at the Cu-polyimide interface by electrons transmitted through the Cu film. Finally, we selectively form conductive regions in a Cu film on a polyimide substrate under tension and fabricate a strain-responsive organic light-emitting device.

Enhancement of optical resolution in three-dimensional refractive-index tomograms of biological samples by employing micromirror-embedded coverslips.

Optical diffraction tomography (ODT) enables the reconstruction of the three-dimensional (3D) refractive-index (RI) distribution of a biological cell, which provides invaluable information for cellular and subcellular structures in a non-invasive manner. However, ODT suffers from an inferior axial resolution, due to the limited accessible angles imposed by the numerical aperture of the objective lens. In this study, we propose and experimentally demonstrate an approach to enhance the 3D reconstruction performance in ODT. By employing trapezoidal micromirrors, side scattered signals from the sample are measured for various side plane-wave-illumination angles. By combining the side scattered fields with the forward scattered fields, the axial resolution and 3D image quality of ODT are improved, without changing optical instruments. The feasibility and applicability of the proposed method are demonstrated by reconstructing the 3D RI distribution of a red blood cell and HeLa cells in hydrogel. We also present systematic analyses of the improved 3D imaging performance using numerical simulations and experimental measurements for the 3D transfer function, a point object, and a microsphere. The analyses demonstrate an improved axial resolution of 0.31 µm, 4.8 times smaller than that of the conventional method. The proposed method enables the non-invasive and accurate 3D imaging of 3D cultured cells, which is crucial for cell biology studies.

Off-centered Double-slit Metamaterial for Elastic Wave Polarization Anomaly.

The polarization anomaly refers to the polarization transition from longitudinal to shear modes along an equi-frequency contour of the same branch, which occurs only in some anisotropic elastic media, but the lack of natural materials exhibiting desired anisotropy makes its utilization impossible for potential novel applications. In this paper, we present a unique, non-resonant type elastic metamaterial made of off-centered, double-slit unit cells. We show that its wave polarization characteristics that determine the desired anomalous polarization for a certain application are tailorable. As an application, a mode converting wedge that transforms pure longitudinal into pure shear modes is designed by the proposed metamaterial. The physics involved in the mode conversion is investigated by simulations and experiments.