c-Axis Aligned 3 nm Thick In2O3 Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility-Stability Trade-off.

Oxide semiconductors (OS) are attractive materials for memory and logic device applications owing to their low off-current, high field effect mobility, and superior large-area uniformity. Recently, successful research has reported the high field-effect mobility (µFE) of crystalline OS channel transistors (above 50 cm2 V-1 s-1). However, the memory and logic device application presents challenges in mobility and stability trade-offs. Here, we propose a method for achieving high-mobility and high-stability by lowering the grain boundary effect. A DBADMIn precursor was synthesized to deposit highly c-axis-aligned C(222) crystalline 3 nm thick In2O3 films. In this study, the 250 °C deposited 3 nm thick In2O3 channel transistor exhibited high µFE of 41.12 cm2 V-1 s-1, Vth of -0.50 V, and SS of 150 mV decade-1 with superior stability of 0.16 V positive shift during PBTS at 100 °C, 3 MV cm-1 stress conditions for 3 h.

Wide process temperature of atomic layer deposition for In2O3thin-film transistors using novel indium precursor (N,N'-di-tert butylacetimidamido)dimethyllindium.

This study introduces a novel heteroleptic indium complex, which incorporates an amidinate ligand, serving as a high-temperature atomic layer deposition (ALD) precursor. The most stable structure was determined using density functional theory and synthesized, demonstrating thermal stability up to 375 °C. We fabricated indium oxide thin-film transistors (In2O3TFTs) prepared with DBADMI precursor using ALD in wide range of window processing temperature of 200 °C, 300 °C, and 350 °C with an ozone (O3) as the source. The growth per cycle of ALD ranged from 0.06 to 0.1 nm cycle-1at different deposition temperatures. X-ray diffraction and transmission electron microscopy were employed to analyze the crystalline structure as it relates to the deposition temperature. At a relatively low deposition temperature of 200 °C, an amorphous morphology was observed, while at 300 °C and 350 °C, crystalline structures were evident. Additionally, x-ray photoelectron spectroscopy analysis was conducted to identify the In-O and OH-related products in the film. The OH-related product was found to be as low as 1% with an increase the deposition temperature. Furthermore, we evaluated In2O3TFTs and observed an increase in field-effect mobility, with minimal change in the threshold voltage (Vth), at 200 °C, 300 °C, and 350 °C. Consequently, the DBADMI precursor, given its stability at highdeposition temperatures, is ideal for producing high-quality films and stable crystalline phases, with wide processing temperature range makeing it suitable for various applications.

Studies on the Role of Nitrogen in the Feed for Fischer-Tropsch Synthesis Under Fixed-Bed Reactor System.

In this study, Co/Al203 catalyst for Fischer-Tropsch synthesis was prepared via slurry impregnation method and the catalyst was characterized by various techniques such as TPR, XRD, TGA and N2 physisorption. To dissolve the wax, after-reaction catalyst was dewaxed using n-Hexane at 60 *C. The experiments were performed in a bench-scale fixed-bed reactor, under the reaction condition of 230 degrees C, 20 bar and feed volume ratio of H2:CO:N2 = 2:1:0.5-1.5. The methane selectivity and the ratio of olefin to paraffin among C2-C4 hydrocarbons were increased with higher contents of nitrogen in feed gas which result in higher partial pressure ratio of H2 to CO, and also affect methane selectivity which has a significant role in increased CO conversion.

Hydrogenolysis of Glycerol to 1,2-Propanediol Over Clay Based Catalysts.

1,2-propanediol (1,2-PDO) is one of the promising product among the valuable products derived from glycerol and it can be obtained by the catalytic hydrogenolysis of glycerol. Copper-supported clay-based catalysts were prepared with different pore sizes using various ratios of kaolin, Mg, and Al by coprecipitation and applied in the selective hydrogenolysis of glycerol to 1,2-PDO. In recent research, variations of pore volume and pore size could affect the diffusion of reagents within the catalyst due to the collision between reagents or pore wall and reagents. It changes selectivities of each product in hydrogenolysis of glycerol reaction. The physico-chemical properties of the catalysts were analyzed by XRD, N2 physisorption, TPR, CO2-TPD, SEM, and a mercury porosimeter. The Cu/TALCITE 4 catalyst showed 98% 1,2-PDO selectivity with 65% glycerol conversion under the optimized condition of 190 degrees C, 25 bar, and 20 wt% glycerol aqueous solution. It was found that the basic strength and meso-macro pore structure of the catalysts play an important role in glycerol conversion and 1,2-PDO selectivity.