High-precision and long-range measurement of micro-gear starting torque.

The ability to measure micro-starting torque is pivotal for micromechanical equipment, which has wide usage in mechanical manufacturing, electrical, electronic, and other industries. However, the measurement range of existing methods is about N⋅m or mN⋅m. There is not much research on the measurement of micro-torque starting in the µN⋅m. In this paper, a novel micro-gear starting torque measurement system, to the best of our knowledge, is proposed based on an optical lever with a long range from 1 to 10µN⋅m. The system device consists of the optical lever, cantilever, and position sensitive device. A micro-gear was used to assess the performance of the proposed method. The standard deviation of the measured starting torque is 1.2µN⋅m. The external factors that can contribute to the uncertainty of the measurement system, such as force measurement, arm of force, and repeatability, have been analyzed and quantified. The relative combined uncertainty is estimated at 3.0%, approximately.

A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift.

Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temperature drift and cross-interference from the undesirable direction significantly. The natural frequency of the quartz DETF is theoretically calculated, and then the axial stress on the vibration beams is verified through finite element method (FEM) under a 100 g acceleration which is loaded on x-axis, y-axis and z-axis, respectively. Moreover, sensor chip is wire-bonded to a printed circuit board (PCB) which contains two identical oscillating circuits. In addition, a steel shell is selected to package the sensor for experiments. Benefiting from the distinctive configuration of the differential structure, the accelerometer characteristics such as temperature drift and cross-interface are improved. The experimental results demonstrate that the cross-interference is lower than 0.03% and the temperature drift is about 18.16 ppm/°C.