Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries.

We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg(-1) (23 µAhcm(-2)) is attained for the first cycle at C/10 to reach 65 mAhg(-1) (17 µAhcm(-2)) after 10 cycles with a good stability over 40 cycles.