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1.
Nano Lett ; 24(5): 1679-1686, 2024 Feb 07.
Article in English | MEDLINE | ID: mdl-38262062

ABSTRACT

The operation of photonic devices often relies on modulation of their refractive index. While the sub-bandgap index change through bound-electron optical nonlinearity offers a faster response than utilizing free carriers with an overbandgap pump, optical switching often suffers from inefficiency. Here, we use a recently observed metasurface based on mirror-induced optical bound states in the continuum, to enable superior modulation characteristics. We achieve a pulsewidth-limited switching time of 100 fs, reflectance change of 22%, remarkably low energy consumption of 255 µJ/cm2, and an enhancement of modulation contrast by a factor of 440 compared to unpatterned silicon. Additionally, the narrow photonic resonance facilitates the detection of the dispersive nondegenerate two-photon nonlinearity, allowing tunable pump and probe excitation. These findings are explained by a two-band theoretical model for the dispersive nonlinear index. The demonstrated efficient and rapid switching holds immense potential for applications, including quantum photonics, sensing, and metrology.

2.
Nano Lett ; 24(11): 3378-3385, 2024 Mar 20.
Article in English | MEDLINE | ID: mdl-38456747

ABSTRACT

This paper reports how a hybrid system composed of transparent dielectric lattices over a metal mirror can produce high-quality lattice resonances for unidirectional lasing. The enhanced electromagnetic fields are concentrated in the cladding of the periodic dielectric structures and away from the metal. Based on a mirror-image model, we reveal that such high-quality lattice resonances are governed by bound states in the continuum resulting from destructive interference. Using hexagonal arrays of titanium dioxide nanoparticles on a silica-coated silver mirror, we observed lattice resonances with quality factors of up to 2750 in the visible regime. With the lattice resonances as optical feedback and dye solution as the gain medium, we demonstrated unidirectional lasing under optical pumping, where the array size was down to 100 µm × 100 µm. Our scheme can be extended to other spectral regimes to simultaneously achieve strongly enhanced surface fields and high quality factors.

3.
Biosens Bioelectron ; 251: 116126, 2024 May 01.
Article in English | MEDLINE | ID: mdl-38367565

ABSTRACT

Electromagnetic metamaterials feature the capability of squeezing photons into hotspot regions of high intensity near-field enhancement for strong light-matter interaction, underpinning the next generation of emerging biosensors. However, randomly dispersed biomolecules around the hotspots lead to weak interactions. Here, we demonstrate an all-silicon dielectric terahertz metamaterial sensor design capable of passively trapping biomoleculars into the resonant cavities confined with powerful electric field. Specifically, multiple controllable high-quality factor resonances driven by bound states in the continuum (BIC) are realized by employing longitudinal symmetry breaking. The dielectric metamaterial sensor with nearly 15.2 experimental figure-of-merit enabling qualitative and quantitative identification of different amino acids by delivering biomolecules to the hotspots for strong light-matter interactions. It is envisioned that the presented strategy will enlighten high-performance meta-sensors design from microwaves to visible frequencies, and serve as a potential platform for microfluidic sensing, biomolecular capture, and sorting devices.


Subject(s)
Biosensing Techniques , Amino Acids , Cell Movement , Electricity , Microfluidics
4.
ACS Nano ; 18(8): 6477-6486, 2024 Feb 27.
Article in English | MEDLINE | ID: mdl-38350867

ABSTRACT

Enhancing light-matter interaction is a key requisite in the realm of optical sensors. Bound states in the continuum (BICs), possessing high quality factors (Q factors), have shown great advantages in sensing applications. Recent theories elucidate the ability of BICs with hybrid metal-dielectric architectures to achieve high Q factors and high sensitivities. However, the experimental validation of the sensing performance in such hybrid systems remains equivocal. In this study, we propose two symmetry-protected quasi-BIC modes in a metal-dielectric metasurface. Our results demonstrate that, under the normal incidence of light, the quasi-BIC mode dominated by dielectric can achieve a high Q factor of 412 and a sensing performance with a high bulk sensitivity of 492.7 nm/RIU (refractive index unit) and a figure of merit (FOM) of 266.3 RIU-1, while the quasi-BIC mode dominated by metal exhibits a stronger surface affinity in the biotin-streptavidin bioassay. These findings offer a promising approach for implementing metasurface-based sensors, representing a paradigm for high-sensitivity biosensing platforms.

5.
Adv Mater ; : e2406526, 2024 Aug 17.
Article in English | MEDLINE | ID: mdl-39152935

ABSTRACT

Terahertz absorbers are crucial to the cutting-edge techniques in the next-generation wireless communications, imaging, sensing, and radar stealth, as they fundamentally determine the performance of detectors and cloaking capabilities. It has long been a pressing task to find absorbers with customizable performance that can adapt to various environments with low cost and great flexibility. Here, perfect absorption empowered by bound states in the continuum (BICs) is demonstrated, allowing for the tailoring of absorption coefficient, bandwidth, and field of view. The one-port absorbers are interpreted using temporal coupled-mode theory highlighting the dominant role of BICs in the far-field radiation properties. Through a thorough investigation of BICs from the perspective of lattice symmetry, the radiation features of three BIC modes are unraveled using both multipolar and topological analysis. The versatile radiation capabilities of BICs provide ample freedom to meet specific requirements of absorbers, including tunable bandwidth, stable performance in a large field of view, and multiband absorption using a thin and flexible film without extreme geometric demands. These findings offer a systematic approach to developing optoelectronic devices and demonstrate the significant potential of BICs for optical and photonic applications, which will stimulate further studies on terahertz photonics and metasurfaces.

6.
ACS Nano ; 18(9): 7064-7073, 2024 Mar 05.
Article in English | MEDLINE | ID: mdl-38373394

ABSTRACT

Recent development in nonlocal resonance based chiral metasurfaces draws great attention due to their abilities to strongly interact with circularly polarized light at a relatively narrow spectral bandwidth. However, there still remain challenges in realizing effective nonlocal chiral metasurfaces in optical frequency due to demanding fabrications such as 3D-multilayered or nanoscaled chiral geometry, which, in particular, limit their applications to polarimetric detection with high-Q spectra. Here, we study the underlying working principles and reveal the important role of the interaction between high-Q nonlocal resonance and low-Q localized Mie resonance in realizing effective nonlocal chiral metasurfaces. Based on the working principles, we demonstrate one of the simplest types of nonlocal chiral metasurfaces which directly detects a set of Stokes parameters without the numerical combination of transmitted values presented from typical Stokes metasurfaces. This is achieved by minimally altering the geometry and filling ratio of every constituent nanostructure in a unit cell, facilitating consistent-sized nanolithography for all samples experimentally at a targeted wavelength with relatively high-Q spectra. This work provides an alternative design rule to realizing effective polarimetric metasurfaces and the potential applications of nonlocal Stokes parameters detection.

7.
Micromachines (Basel) ; 15(4)2024 Mar 25.
Article in English | MEDLINE | ID: mdl-38675249

ABSTRACT

Current optical tweezering techniques are actively employed in the manipulation of nanoparticles, e.g., biomedical cells. However, there is still huge room for improving the efficiency of manipulating multiple nanoparticles of the same composition but different shapes. In this study, we designed an array of high-index all-dielectric disk antennas, each with an asymmetric open slot for such applications. Compared with the plasmonic counterparts, this all-dielectric metasurface has no dissipation loss and, thus, circumvents the Joule heating problem of plasmonic antennas. Furthermore, the asymmetry-induced excitation of quasi-bound states in continuum (QBIC) mode with a low-power intensity (1 mW/µm2) incidence imposes an optical gradient force of -0.31 pN on 8 nm radius nanospheres, which is four orders of magnitude stronger than that provided by the Fano resonance in plasmonic antenna arrays, and three orders of magnitude stronger than that by the Mie resonance in the same metasurface without any slot, respectively. This asymmetry also leads to the generation of large optical moments. At the QBIC resonance wavelength, a value of 88.3 pN-nm will act on the nanorods to generate a rotational force along the direction within the disk surface but perpendicular to the slot. This will allow only nanospheres but prevent the nanorods from accurately entering into the slots, realizing effective sieving between the nanoparticles of the two shapes.

8.
Micromachines (Basel) ; 15(4)2024 Apr 12.
Article in English | MEDLINE | ID: mdl-38675327

ABSTRACT

Electro-optic modulation devices are essential components in the field of integrated optical chips. High-speed, low-loss electro-optic modulation devices represent a key focus for future developments in integrated optical chip technology, and they have seen significant advancements in both commercial and laboratory settings in recent years. Current electro-optic modulation devices typically employ architectures based on thin-film lithium niobate (TFLN), traveling-wave electrodes, and impedance-matching layers, which still suffer from transmission losses and overall design limitations. In this paper, we demonstrate a lithium niobate electro-optic modulation device based on bound states in the continuum, featuring a non-overlay structure. This device exhibits a transmission loss of approximately 1.3 dB/cm, a modulation bandwidth of up to 9.2 GHz, and a minimum half-wave voltage of only 3.3 V.

9.
Adv Sci (Weinh) ; : e2402917, 2024 Jul 04.
Article in English | MEDLINE | ID: mdl-38962930

ABSTRACT

The confinement of waves in open systems represents a fundamental phenomenon extensively explored across various branches of wave physics. Recently, significant attention is directed toward bound states in the continuum (BIC), a class of modes that are trapped but do not decay in an otherwise unbounded continuum. Here, the theoretical investigation and experimental demonstration of the existence of quasi-bound states in the continuum (QBIC) for ultrasonic waves are achieved by leveraging an elastic Fabry-Pérot metasurface resonator. Several intriguing properties of the ultrasound quasi-bound states in the continuum that are robust to parameter scanning are unveiled, and experimental evidence of a remarkable Q-factor of 350 at ≈1 MHz frequency, far exceeding the state-of-the-art using a fully acoustic underwater system is presented. The findings contribute novel insights into the understanding of BIC for acoustic waves, offering a new paradigm for the design of efficient, ultra-high Q-factor ultrasound devices.

10.
Nanophotonics ; 13(16): 2937-2949, 2024 Jul.
Article in English | MEDLINE | ID: mdl-39006137

ABSTRACT

Thanks to their giant, yet tunable, Q-factor resonances, all-dielectric metasurfaces supporting the quasi-bound states in the continuum (q-BIC) resonances are well-suited to provide a promising platform for quantum-coherent light-matter interactions. Yet, the strong coupling regime, characterized by the hybrid light-matter states - polaritons, has not yet been fully explored in the mid-infrared regime. This paper investigates the parameter space of vibrational strong coupling (VSC) between material and metasurface cavities supporting q-BIC resonances in the mid-infrared spectral range. We outline the effects of transition dipole strength, damping rate, and the number of molecules coupled to a single cavity, as well as the cavity damping rates, to understand their respective impacts on VSC. By tuning the Q-factor of the metasurface and material parameters, a new transition light-matter coupling zone is introduced, bridging the gap between weak and strong coupling, where polaritons form but their linewidths prohibit their spectral identification. The study further identifies the effects of cavity linewidth on polariton peak separability in strongly coupled systems, highlighting that the cavities with smaller nonradiative losses and narrower linewidths facilitate better polariton separability. Moreover, we found that matching cavity and material loss, satisfying the critical strong coupling condition, enhances the coupling strength between cavity and material. Overall, these findings can guide the design of photonic cavities suited for VSC experiments, contributing to the burgeoning fields of polaritonic chemistry, light-mediated modulation of chemical reactivity, and highly sensitive molecular spectroscopy.

11.
ACS Nano ; 18(18): 11644-11654, 2024 May 07.
Article in English | MEDLINE | ID: mdl-38653474

ABSTRACT

Nanophotonic devices excel at confining light into intense hot spots of electromagnetic near fields, creating exceptional opportunities for light-matter coupling and surface-enhanced sensing. Recently, all-dielectric metasurfaces with ultrasharp resonances enabled by photonic bound states in the continuum (BICs) have unlocked additional functionalities for surface-enhanced biospectroscopy by precisely targeting and reading out the molecular absorption signatures of diverse molecular systems. However, BIC-driven molecular spectroscopy has so far focused on end point measurements in dry conditions, neglecting the crucial interaction dynamics of biological systems. Here, we combine the advantages of pixelated all-dielectric metasurfaces with deep learning-enabled feature extraction and prediction to realize an integrated optofluidic platform for time-resolved in situ biospectroscopy. Our approach harnesses high-Q metasurfaces specifically designed for operation in a lossy aqueous environment together with advanced spectral sampling techniques to temporally resolve the dynamic behavior of photoswitchable lipid membranes. Enabled by a software convolutional neural network, we further demonstrate the real-time classification of the characteristic cis and trans membrane conformations with 98% accuracy. Our synergistic sensing platform incorporating metasurfaces, optofluidics, and deep learning reveals exciting possibilities for studying multimolecular biological systems, ranging from the behavior of transmembrane proteins to the dynamic processes associated with cellular communication.


Subject(s)
Artificial Intelligence , Surface Properties , Spectrum Analysis/methods , Membrane Lipids/chemistry , Deep Learning
12.
ACS Nano ; 18(20): 12897-12904, 2024 May 21.
Article in English | MEDLINE | ID: mdl-38710615

ABSTRACT

Semiconducting transition metal dichalcogenides (TMDs) have gained significant attention as a gain medium for nanolasers, owing to their unique ability to be easily placed and stacked on virtually any substrate. However, the atomically thin nature of the active material in existing TMD lasers and the limited size due to mechanical exfoliation presents a challenge, as their limited output power makes it difficult to distinguish between true laser operation and other "laser-like" phenomena. Here, we present room temperature lasing from a large-area tungsten disulfide (WS2) monolayer, grown by a wafer-scale chemical vapor deposition (CVD) technique. The monolayer is placed on a dual-resonance dielectric metasurface with a rectangular lattice designed to enhance both absorption and emission, resulting in an ultralow threshold operation (threshold well below 1 W/cm2). We provide a thorough study of the laser performance, paying special attention to directionality, output power, and spatial coherence. Notably, our lasers demonstrated a coherence length of over 30 µm, which is several times greater than what has been reported for 2D material lasers so far. Our realization of a single-mode laser from a CVD-grown monolayer presents exciting opportunities for integration and the development of real-world applications.

13.
ACS Nano ; 18(32): 21211-21220, 2024 Aug 13.
Article in English | MEDLINE | ID: mdl-39079002

ABSTRACT

In photonics, achieving high-quality (Q) resonance is crucial for high-sensitivity devices used in applications, such as switching, sensing, and lasing. However, high-Q resonances are highly susceptible to internal losses of plasmonic devices, impeding their integration into broader systems across terahertz and visible light bands. Here, we overcome this challenge by proposing a low-Q plasmonic metasurface for ultrasensitive terahertz (THz) switching and sensing. Theoretically, we reveal an approach to constructing a low-Q resonator possessing high sensitivity to nonradiative losses. Leveraging this mechanism, we design a highly sensitive plasmonic metasurface induced by strong coupling between a quasi-bound state in the continuum and a dipole mode. By hybridizing with the germanium layer, the metadevice exhibits an ultralow pump threshold of 192 µJ/cm2 and an ultrafast switching cycle time of 7 ps. Furthermore, it also shows a high sensitivity of 224 GHz/RIU in refractive index sensing. The proposed paradigm of constructing low-Q and high-sensitivity photonic devices can be applied to biosensing, wide-band filters, and sensitive modulators.

14.
ACS Nano ; 18(5): 4388-4397, 2024 Feb 06.
Article in English | MEDLINE | ID: mdl-38258757

ABSTRACT

Coherent deep ultraviolet (DUV) light sources are crucial for various applications such as nanolithography, biomedical imaging, and spectroscopy. DUV light sources can be generated by using conventional nonlinear optical crystals (NLOs). However, NLOs are limited by their bulky size, inadequate transparency at the DUV regime, and stringent phase-matching requirements for harmonic generation. Recently, dielectric metasurfaces support high Q-factor resonances and offer a promising approach for efficient harmonic generation at short wavelengths. In this study, we demonstrated a crystalline silicon (c-Si) metasurface simultaneously exciting modal phase-matched bound states in the continuum (BIC) resonance at the fundamental wavelength of 840 nm with a higher degree of freedom for precise control of the BIC resonance and a plasmonic resonance at the wavelength of 280 nm in the DUV to enhance third harmonic generation (THG). We experimentally achieved a Q-factor of ∼180 owing to the relatively large refractive index of the c-Si and the geometric symmetry breaking of the structure. We realized THG at a wavelength of 280 nm with a power of 14.5 nW by using a peak power density of 15 GW/cm2 excitation. The measured THG power is 14 times higher than the state-of-the-art THG dielectric metasurfaces using the same peak power density in the DUV regime, and the maximum obtained THG power enhancement factor is up to 48. This approach relies on the significant third-order nonlinear susceptibility of c-Si, the interband plasmonic nature of the c-Si in the DUV, and the strong field confinement of BIC resonance to boost overall nonlinear conversion efficiency to 5.2 × 10-6% in the DUV regime. Our work shows the potential of c-Si BIC metasurfaces for developing efficient and ultracompact DUV light sources using high-efficacy nonlinear optical devices.

15.
Adv Mater ; : e2400214, 2024 Jul 26.
Article in English | MEDLINE | ID: mdl-39054935

ABSTRACT

Owing to their strong exciton effects and valley polarization properties, monolayer transition-metal dichalcogenides (1L TMDs) have unfolded the prospects of spin-polarized light-emitting devices. However, the wavefront control of exciton emission, which is critical to generate structured optical fields, remains elusive. In this work, the experimental demonstration of spin-locked vortex emission from monolayer Tungsten Disulfide (1L WS2) integrated with Silicon Nitride (SiNx) PhC slabs is presented. The symmetry-protected bound states in the continuum (BIC) in the SiNx PhC slabs engender azimuthal polarization field distribution in the momentum space with a topological singularity in the center of the Brillouin zone, which imposes the resonantly enhanced WS2 exciton emission with a spin-correlated spiral phase front by taking advantage of the winding topologies of resonances with the assistance of geometric phase scheme. As a result, exciton emission from 1L WS2 exhibits helical wavefront and doughnut-shaped intensity beam profile in the momentum space with topological charges locked to the spins of light. This strategy on spin-dependent excitonic vortex emission may offer the unparalleled capability of valley-polarized structured light generation for 1L TMDs.

16.
Adv Mater ; : e2405978, 2024 Aug 02.
Article in English | MEDLINE | ID: mdl-39092689

ABSTRACT

Photonic metasurfaces offer exceptional control over light at the nanoscale, facilitating applications spanning from biosensing, and nonlinear optics to photocatalysis. Many metasurfaces, especially resonant ones, rely on periodicity for the collective mode to form, which makes them subject to the influences of finite size effects, defects, and edge effects, which have considerable negative impact at the application level. These aspects are especially important for quasi-bound state in the continuum (BIC) metasurfaces, for which the collective mode is highly sensitive to perturbations due to high-quality factors and strong near-field enhancement. Here, the mode formation in quasi-BIC metasurfaces on the individual resonator level using scattering scanning near-field optical microscopy (s-SNOM) in combination with a new image processing technique, is quantitatively investigated. It is found that the quasi-BIC mode is formed at a minimum size of 10 × 10-unit cells much smaller than expected from far-field measurements. Furthermore, it is shown that the coupling direction of the resonators, defects and edge states have pronounced influence on the quasi-BIC mode. This study serves as a link between the far-field and near-field responses of metasurfaces, offering crucial insights for optimizing spatial footprint and active area, holding promise for augmenting applications such as catalysis and biospectroscopy.

17.
Adv Mater ; 36(25): e2314279, 2024 Jun.
Article in English | MEDLINE | ID: mdl-38511549

ABSTRACT

Surface-enhanced infrared absorption spectroscopy (SEIRA) has emerged as a powerful technique for ultrasensitive chemical-specific analysis. SEIRA can be realized by employing metasurfaces that can enhance light-matter interactions in the spectral bands of molecular vibrations. Increasing sample complexity emphasizes the need for metasurfaces that can operate simultaneously at different spectral bands, both accessing rich spectral information over a broad band, and resolving subtle differences in the absorption fingerprints through narrow-band resonances. Here, a novel concept of resonance-gradient metasurfaces is introduced, where the required spectral selectivity is achieved via local high-quality-factor (high-Q) resonances, while the continuous coverage of a broad band is enabled by the gradual adjustment of the unit-cell dimensions along the planar structure. The highly tailorable design of the gradient metasurfaces provides flexibility for shaping the spectral sampling density to match the relevant bands of target analytes while keeping a compact device footprint. The versatility of the gradient metasurfaces is demonstrated through several sensing scenarios, including polymer mixture deconvolution, detecting a multistep bioassay, and identification of the onset of vibrational strong coupling regime. The proposed gradient-resonance platform significantly contributes to the rapidly evolving landscape of nonlocal metasurfaces, enabling applications in molecular detection and analysis of fundamental light-matter interaction phenomena.

18.
ACS Appl Mater Interfaces ; 16(25): 32836-32846, 2024 Jun 26.
Article in English | MEDLINE | ID: mdl-38874560

ABSTRACT

Plasmonic hot-electron-based photodetectors (HEB-PDs) have received widespread attention for their ability to realize effective carrier collection under sub-bandgap illumination. However, due to the low hot electron emission probability, most of the existing HEB-PDs exhibit poor responsivity, which significantly restricts their practical applications. Here, by employing the binary-pore anodic alumina oxide template technique, we proposed a compact plasmonic bound state in continuum metasurface-semiconductor-metal-based (BIC M-S-M) HEB-PD. The symmetry-protected BIC can manipulate a strong gap surface plasmon in the stacked M-S-M structure, which effectively enhances light-matter interactions and improves the photoresponse of the integrated device. Notably, the optimal M-S-M HEB-PD with near-unit absorption (∼90%) around 800 nm delivers a responsivity of 5.18 A/W and an IPCE of 824.23% under 780 nm normal incidence (1 V external bias). Moreover, the ultrathin feature of BIC M-S-M (∼150 nm) on the flexible substrate demonstrates excellent stability under a wide range of illumination angles from -40° to 40° and at the curvature surface from 0.05 to 0.13 mm-1. The proposed plasmonic BIC strategy is very promising for many other hot-electron-related fields, such as photocatalysis, biosensing, imaging, and so on.

19.
ACS Nano ; 18(20): 12771-12780, 2024 May 21.
Article in English | MEDLINE | ID: mdl-38708928

ABSTRACT

Three-dimensional (3D) plasmonic metamaterials, featuring well-arranged subwavelength nanostructures, facilitate effective coupling between electrical dipoles and incident electromagnetic waves. This coupling allows for unique optical responses including localized surface plasmon resonance (LSPR) and quasi-bound states in the continuum (q-BIC). While 3D plasmonic metamaterials with LSPR and q-BIC have been independently explored for sensors, achieving simultaneous optical responses in the near-infrared region remains challenging. Here, we present 3D plasmonic metamaterials that integrate LSPR and q-BIC within a single π-shaped plasmonic structure, fabricated using a 3D aerosol nanoprinting technique. This printing technique controls the local electrostatic field to precisely position charged metallic nanoaerosols, enabling parallel printing of π-shaped plasmonic structures under ambient conditions. The printed π-shaped plasmonic structures exhibit two distinct optical modes: x-polarization-sensitive LSPR and transverse magnetic mode-sensitive q-BIC within the near-infrared region. Exploiting these dual optical responses, we demonstrate simultaneous polarization detection and incident angle analysis by integrating the π-shaped plasmonic structures into commercial Fourier-transform infrared spectroscopy, termed "numerical aperture-detective polarimetry". This approach holds promise for evaluating alignment in optical and imaging systems with light distribution analysis. Furthermore, the 3D aerosol nanoprinting technique provides an avenue for fabricating 3D plasmonic metamaterials with intricate geometries and optical properties, expanding their potential applications in nano-optics.

20.
ACS Nano ; 18(29): 18880-18888, 2024 Jul 23.
Article in English | MEDLINE | ID: mdl-38991129

ABSTRACT

Emitting light toward on-demand directions is important for various optoelectronic applications, such as optical communication, displaying, and ranging. However, almost all existing directional emitters are assemblies of passive optical antennae and external light sources, which are usually bulky and fragile and show unendurable loss of light power. Here we theoretically propose and experimentally demonstrate a conceptual design of a directional emitter, by using a single surface-emitting laser source itself to achieve dynamically controlled beam steering. The laser is built on photonic crystals that operate near the band edges in the continuum. By shrinking laser sizes to tens-of-wavelength, the optical modes quantize in three-dimensional momentum space, and each of them directionally radiates toward the far-field. Further utilizing the luminescence spectrum shifting effect under current injection, we consecutively select a sequence of modes into lasing action and show the laser maintaining single-mode operation with line widths at a minimum of 1.8 MHz and an emitting power of ∼10 milliwatts, and we demonstrate fast beam steering across a range of 3.2° × 4° on a time scale of 500 ns. Our work proposes a method for on-chip active beam steering for the development of automotive, industrial, and robotic applications.

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