Synthesis and electrical properties of (Bi(1/2)Na(1/2))TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique.
J Nanosci Nanotechnol
; 6(11): 3479-82, 2006 Nov.
Article
in En
| MEDLINE
| ID: mdl-17252793
ABSTRACT
This study aims to synthesize lead-free ferroelectric material, (Bi(1/2)Na(1/2))TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi(1/2)Na(1/2))TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6-16.8 microC/cm2, 325-350, respectively.
Search on Google
Collection:
01-internacional
Database:
MEDLINE
Main subject:
Titanium
/
Nanoparticles
/
Microelectrodes
Language:
En
Journal:
J Nanosci Nanotechnol
Year:
2006
Type:
Article
Affiliation country:
South Korea