Thermo-optic coefficient of PECVD silicon-rich silicon nitride.
Opt Lett
; 45(22): 6242-6245, 2020 Nov 15.
Article
in En
| MEDLINE
| ID: mdl-33186960
ABSTRACT
The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Opt Lett
Year:
2020
Type:
Article