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Evaporation of Ti/Cr/Ti Multilayer on Flexible Polyimide and Its Application for Strain Sensor.
Hsiao, Yu-Jen; Lin, Ru-Li; Wang, Hwi-Ming; Cai, Cheng-Zhe.
Affiliation
  • Hsiao YJ; Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
  • Lin RL; Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
  • Wang HM; Department of Electrical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
  • Cai CZ; Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
Micromachines (Basel) ; 12(4)2021 Apr 19.
Article in En | MEDLINE | ID: mdl-33921553
ABSTRACT
A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge show that adding Cr interlayer can improve the recovery and stability of the sensing electrode. When the interlayer Cr thickness was increased from 0 to 70 nm, the resistance decreased from 27 to 8.8 kΩ. The gauge factor (GF) value also decreased from 4.24 to 2.31 with the increase in the thickness of Cr interlayer from 30 to 70 nm, and the hysteresis phenomenon disappeared gradually. The multilayer Ti/Cr/Ti film has feasible application for strain sensor.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Type: Article Affiliation country: Taiwan
Fulltext
Print
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PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Type: Article Affiliation country: Taiwan