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Complete stress release in monolayer ALD-Al2O3 films based on mechanical equilibrium homeostasis to realize a bending radius of 1 mm.
Li, Ze; Wang, Zhenyu; Chen, Ziqiang; Feng, Jing; Wang, Jintao; Fan, Siyu; Sun, Hongbo; Duan, Yu.
Affiliation
  • Li Z; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Wang Z; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Chen Z; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Feng J; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Wang J; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Fan S; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Sun H; State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China. duanyu@jlu.edu.cn.
  • Duan Y; State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Haidian, Beijing 100084, China.
Soft Matter ; 18(25): 4756-4766, 2022 Jun 29.
Article in En | MEDLINE | ID: mdl-35703537
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Soft Matter Year: 2022 Type: Article Affiliation country: China
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Soft Matter Year: 2022 Type: Article Affiliation country: China