RESUMEN
A 3D optical proximity correction (OPC) method for controlling the morphology of micro-structures in laser direct writing is proposed, considering both the optical proximity effect and nonlinear response of a thick-film photoresist. This method can improve the manufacturability and optical performance of devices, and can be used for most 3D micro\nano structures. Its application in the fabrication of a quadratic curvature microlens array shows that the shape of the lens is well controlled; that is, when the height of the lens is 5.25â µm, the average height error of the lens shape is less than 5.22%.
RESUMEN
Improving photothermal efficiency can reduce the melting threshold of metal nanowires. The photothermal efficiency of a polarized laser to Cu nanowires was investigated by numerical simulation and experiment. Our simulation results reveal that the photothermal efficiency of a polarized laser depends on the intensity and distribution area of surface plasmons excited by the laser. As the angle between the polarization direction of the incident laser and the long axis of the Cu nanowire increases, the laser-excited surface plasmons shift from both ends to the sidewall of the Cu nanowire. Such a distribution of surface plasmons was confirmed by the melting behavior of Cu nanowires irradiated by a 450 nm polarized laser. Increasing the laser wavelength will enhance the intensity of the surface plasmons but reduce the distribution area of the surface plasmons. As a result, a higher photothermal efficiency was achieved using a laser with a polarization direction perpendicular to the long axis of the Cu nanowire and a wavelength less than 550 nm. Due to the higher photothermal efficiency, the melting threshold of Cu nanowire irradiated by a laser with polarization perpendicular to the long axis of the Cu nanowire is 32 mW, which is around 20% lower that of Cu nanowire irradiated by a laser with polarization parallel to the long axis of the Cu nanowire.
RESUMEN
Light-nanomaterial interaction is accompanied by a scattering force and a heating effect. When silver nanowires are irradiated by a laser pulse with light intensity above the melting threshold, they are observed to melt into nanospheres and fly away from their original position. Simulation and experimental results show that the localized surface plasmon resonance excited by laser pulse will heat the ends and junction areas of silver nanowires, causing the occurrence of local melting at these locations. Since the local melting cannot alter the position of silver nanowire, a mathematical model was developed to evaluate the scattering force acting on silver nanowire. According to the developed mathematical model, the scattering force acting on silver nanowire mainly depends on specific surface area of silver nanowire and incident light intensity. When the light intensity of the laser pulse is ${3.0} \times {{10}^{12}}\;{\rm W}/{{\rm m}^2}$3.0×1012W/m2, the scattering force acting on the silver nanowire can reach ${{10}^5}$105 times the gravity of silver nanowire. To obtain silver nanowires networks, the light intensity of the laser pulse was manipulated to regulate the scattering force and heating effect acting on the silver nanowire. As a result, silver nanowire networks were obtained with light intensity of ${1.4} \times {{10}^{10}}\;{\rm W}/{{\rm m}^2}$1.4×1010W/m2 at a scanning speed of 1000 mm/s. This laser-induced plasmonic welding paves the way for improved understanding and control of fundamental laser-nanomaterial interactions.
RESUMEN
Microlens array (MLA) has been widely applied in augmented reality and optical imaging. When used in a humid environment or medical endoscopy, MLA needs to be both superhydrophobic and multifocal. However, it is not easy to achieve both superhydrophobic and multifocal function by integrating superhydrophobic and multifocal structures on the same surface by means of a simple, efficient, and precise method. In this paper, the superhydrophobic multifocal MLA with superhydrophobic properties and multifocal functions is successfully designed for preparation based on a method of 3D lithography and soft lithography. The 3D lithography can further help the preparation of a multifocal MLA with varying apertures and a multistep superhydrophobic structure with a round dome. The superhydrophobic multifocal MLA with periods 50 and 120 µm has perfect superhydrophobic property. The water droplet can slide and bounce off the surface at a roll angle of less than 12.9° with both multifocal and integrated imaging function, as well as up to 397 µm depth-of-field (DOF) detection range; this greatly exceeds the conventional MLA. The perfect superhydrophobic and optical property can be achieved in an extremely humid environment. The superhydrophobic multifocal MLA proposed in this paper has a promising prospect for actual practices.
RESUMEN
The artificial compound eye (ACE) with zoom imaging requires complex power sources. Meanwhile, its curved substrate makes it difficult for the ACE to realize the zoom imaging on flat surfaces. To realize a wide field of view and a zoom function on both curved and flat surfaces simultaneously, a novel ACE is proposed, which is a bionic design inspired by an ancient creature, trilobite. Compared with a dragonfly, photosensitive units of a trilobite's compound eye are composed of ommatidia with different focal lengths. By learning from this concept, an artificial hyper compound eye (AHCE) was fabricated. Its basic components are five microlenses with different curvatures, and they are capable of being treated as five ommatidia with different focal lengths. Five ommatidia form a photosensitive unit to realize a zoom function. AHCE is capable of variable-focus imaging on curved surfaces. With the information share function, we found that the AHCE not only images on curved surfaces but also has a zoom-imaging function on flat surfaces. The results confirm that the AHCE demonstrates an advanced imaging capability, a variable-focus imaging function on both curved and flat surfaces, which may open new opportunities in developing advanced micro-optical devices.
RESUMEN
A microlens array (MLA) is an essential optical imaging device in the applications of augmented and virtual realities. The imaging of MLA would become blurry in a humid outdoor atmosphere. While the incorporation of superhydrophobicity to MLA would prevent the adhesion of droplets, the complex structure and the multiple fabrication process reduce the capability of optical imaging of MLA. Herein, a flexible superhydrophobic MLA with good optical imaging capability is successfully fabricated by the combination of 3D direct laser writing (DLW) and soft lithography. 3D DLW allows the fabrication of MLA with a hierarchical pillar array (h-MLA) in one step, which ensures good optical properties of the resulting polydimethylsiloxane (PDMS) h-MLA. The resulting h-MLAs with pitches ranging between 50 and 100 µm are superhydrophobic from which water droplets slide away at a sliding angle smaller than 15.6° and bounce off from the surface. Meanwhile, the hierarchical pillar array has a limited impact on the imaging capability and the field of view of h-MLA. With an optimized pitch of 60 µm, h-MLA has a transparency as good as MLA. Moreover, PDMS h-MLA retains excellent optical and superhydrophobic properties when bent and in an extremely humid environment. We believe that the proposed h-MLA could find applications in outdoor environments.