Defect Filling Method of Sensor Encapsulation Based on Micro-Nano Composite Structure with Parylene Coating.

Yao, Jialin; Qiang, Wenjiang; Guo, Xingqi; Fan, Hanshui; Zheng, Yushuang; Xu, Yan; Yang, Xing

Yao, Jialin; Qiang, Wenjiang; Guo, Xingqi; Fan, Hanshui; Zheng, Yushuang; Xu, Yan; Yang, Xing.

Afiliación

Yao J; The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Qiang W; School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Guo X; School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Fan H; The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Zheng Y; School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Xu Y; School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Yang X; School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.

Sensors (Basel) ; 21(4)2021 Feb 05.

Article en En | MEDLINE | ID: mdl-33562626

Palabras clave

MEMS; composite structure; defect filling method; parylene coatings; pressure sensors

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2021 Tipo del documento: Article País de afiliación: China

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