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Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis.
Zhou, Wei-Yu; Chen, Hsuan-Fan; Tseng, Xue-Li; Lo, Hsiao-Han; Wang, Peter J; Jiang, Ming-Yu; Fuh, Yiin-Kuen; Li, Tomi T.
Afiliación
  • Zhou WY; Department of Mechanical Engineering, National Central University, Taoyuan 320317, Taiwan.
  • Chen HF; Department of Mechanical Engineering, National Central University, Taoyuan 320317, Taiwan.
  • Tseng XL; Department of Mechanical Engineering, National Central University, Taoyuan 320317, Taiwan.
  • Lo HH; Delta Electronics Incorporated, Taipei 100116, Taiwan.
  • Wang PJ; Delta Electronics Incorporated, Taipei 100116, Taiwan.
  • Jiang MY; Delta Electronics Incorporated, Taipei 100116, Taiwan.
  • Fuh YK; Department of Mechanical Engineering, National Central University, Taoyuan 320317, Taiwan.
  • Li TT; Department of Mechanical Engineering, National Central University, Taoyuan 320317, Taiwan.
Materials (Basel) ; 16(8)2023 Apr 11.
Article en En | MEDLINE | ID: mdl-37109853
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Materials (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán
Texto completo
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XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Materials (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán