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Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Park, Yonggyun; Liu, Pengzhan; Lee, Seunghwan; Cho, Jinill; Joo, Eric; Kim, Hyeong-U; Kim, Taesung.
Afiliación
  • Park Y; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Liu P; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Lee S; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Cho J; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Joo E; ComdelKorea, Ltd., 120 Heungdeokjungang-ro, Giheung-gu, Yongin 16950, Republic of Korea.
  • Kim HU; Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea.
  • Kim T; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Sensors (Basel) ; 23(12)2023 Jun 14.
Article en En | MEDLINE | ID: mdl-37420730
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Asunto principal: Óxidos / Enfermedades Cardiovasculares Tipo de estudio: Diagnostic_studies / Prognostic_studies Límite: Humans Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article
Texto completo
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Asunto principal: Óxidos / Enfermedades Cardiovasculares Tipo de estudio: Diagnostic_studies / Prognostic_studies Límite: Humans Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article