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Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.
Guo, Yuzhen; Zhang, Zengxing; Yao, Bin; Chai, Jin; Zhang, Shiqiang; Liu, Jianwei; Zhao, Zhou; Xue, Chenyang.
Afiliación
  • Guo Y; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
  • Zhang Z; Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China.
  • Yao B; Tan Kah Kee Innovation Laboratory, Xiamen 361005, China.
  • Chai J; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
  • Zhang S; Xiamen Zehuo Industry Digital Research Institute Co., Ltd., Xiamen 361005, China.
  • Liu J; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
  • Zhao Z; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
  • Xue C; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Sensors (Basel) ; 23(13)2023 Jun 30.
Article en En | MEDLINE | ID: mdl-37447910
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Asunto principal: Sistemas Microelectromecánicos Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China
Texto completo
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PubMed Links
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Asunto principal: Sistemas Microelectromecánicos Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China