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1.
ACS Appl Mater Interfaces ; 16(24): 31677-31686, 2024 Jun 19.
Artículo en Inglés | MEDLINE | ID: mdl-38833518

RESUMEN

Due to their compact size and exceptional sensitivity at room temperature, magnetoresistance (MR) sensors have garnered considerable interest in numerous fields, particularly in the detection of weak magnetic signals in biological systems. The "magnetrodes", integrating MR sensors with needle-shaped Si-based substrates, are designed to be inserted into the brain for local magnetic field detection. Although recent research has predominantly focused on giant magnetoresistance (GMR) sensors, tunnel magnetoresistance (TMR) sensors exhibit a significantly higher sensitivity. In this study, we introduce TMR-based magnetrodes featuring TMR sensors at both the tip and midsection of the probe, enabling detection of local magnetic fields at varied spatial positions. To enhance detectivity, we designed and fabricated magnetrodes with varied aspect ratios of the free layer, incorporating diverse junction shapes, quantities, and serial arrangements. Utilizing a custom-built magnetotransport and noise measurement system for characterization, our TMR-based magnetrode demonstrates a limit of detection (LOD) of 300pT/Hz at 1 kHz. This implies that neuronal spikes can be distinguished with minimal averaging, thereby facilitating the elucidation of their magnetic properties.

2.
Micromachines (Basel) ; 15(4)2024 Apr 12.
Artículo en Inglés | MEDLINE | ID: mdl-38675327

RESUMEN

Electro-optic modulation devices are essential components in the field of integrated optical chips. High-speed, low-loss electro-optic modulation devices represent a key focus for future developments in integrated optical chip technology, and they have seen significant advancements in both commercial and laboratory settings in recent years. Current electro-optic modulation devices typically employ architectures based on thin-film lithium niobate (TFLN), traveling-wave electrodes, and impedance-matching layers, which still suffer from transmission losses and overall design limitations. In this paper, we demonstrate a lithium niobate electro-optic modulation device based on bound states in the continuum, featuring a non-overlay structure. This device exhibits a transmission loss of approximately 1.3 dB/cm, a modulation bandwidth of up to 9.2 GHz, and a minimum half-wave voltage of only 3.3 V.

3.
Micromachines (Basel) ; 15(3)2024 Mar 01.
Artículo en Inglés | MEDLINE | ID: mdl-38542607

RESUMEN

To mitigate the impact of low-frequency noise from the tunnel magnetoresistance (TMR) current sensor and ambient stray magnetic fields on weak current detection accuracy, we propose a high-resolution modulation-demodulation test method. This method modulates and demodulates the measurement signal, shifting low-frequency noise to the high-frequency band for effective filtering, thereby isolating the target signal from the noise. In this study, we developed a Simulink model for the TMR current sensor modulation-demodulation test method. Practical time-domain and frequency-domain tests of the developed high-resolution modulation-demodulation method revealed that the TMR current sensor exhibits a nonlinearity as low as 0.045%, an enhanced signal-to-noise ratio (SNR) of 77 dB, and a heightened resolution of 100 nA. The findings indicate that this modulation-demodulation test method effectively reduces the impact of low-frequency noise on TMR current sensors and can be extended to other types of resistive devices.

4.
Adv Sci (Weinh) ; 11(12): e2306832, 2024 Mar.
Artículo en Inglés | MEDLINE | ID: mdl-38236170

RESUMEN

Due to the high application value in intelligent robots, tactile sensors with large sensing area and multi-dimensional sensing ability have attracted the attention of researchers in recent years. Inspired by bionics of hairs on human skin, a flexible tactile sensor based on magnetic cilia array is developed, showing extremely high sensitivity and stability. The upper layers of the sensor are multiple magnetic cilia containing magnetic particles, while the lower layer is a serpentine flexible circuit board with a magnetic sensor array. When magnetic cilia are bent under force, the magnetic sensor array can detect changes in the magnetic field, thereby the magnitude and direction of external force can be obtained. The proposed sensor has a resolution of 0.2 mN with a working range of 0-19.5 mN and can distinguish the direction of external force. The large sensing area and short response time make this sensor suitable for sliding tactile detection, and experiments show that the sensor can be also applied in object recognition with a success accuracy of 97%. In addition to the shape of objects, the sensor can identify whether there is magnetism inside objects, making it of significant value in intelligent robots and modern medicine.

5.
Micromachines (Basel) ; 14(12)2023 Nov 26.
Artículo en Inglés | MEDLINE | ID: mdl-38138328

RESUMEN

Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this reason, a MEMS fluxgate sensor based on liquid casting with a closed-loop Fe-based amorphous alloy core is proposed. Based on the process parameters of liquid casting, the structure of the MEMS fluxgate sensor was designed. Utilizing MagNet to build the simulation model, the optimal excitation conditions and sensitivity were obtained. According to the simulation model, a highly sensitive MEMS fluxgate sensor based on liquid casting was fabricated. The resulting sensor exhibits a sensitivity of 2847 V/T, a noise of 306 pT/√Hz@1 Hz, a bandwidth of DC-10.5 kHz, and a power consumption of 43.9 mW, which shows high sensitivity and low power consumption compared with other MEMS fluxgates in similar size.

6.
Sensors (Basel) ; 21(2)2021 Jan 19.
Artículo en Inglés | MEDLINE | ID: mdl-33477948

RESUMEN

Thanks to high sensitivity, excellent scalability, and low power consumption, magnetic tunnel junction (MTJ)-based tunnel magnetoresistance (TMR) sensors have been widely implemented in various industrial fields. In nondestructive magnetic flux leakage testing, the magnetic sensor plays a significant role in the detection results. As highly sensitive sensors, integrated MTJs can suppress frequency-dependent noise and thereby decrease detectivity; therefore, serial MTJ-based sensors allow for the design of high-performance sensors to measure variations in magnetic fields. In the present work, we fabricated serial MTJ-based TMR sensors and connected them to a full Wheatstone bridge circuit. Because noise power can be suppressed by using bridge configuration, the TMR sensor with Wheatstone bridge configuration showed low noise spectral density (0.19 µV/Hz0.5) and excellent detectivity (5.29 × 10-8 Oe/Hz0.5) at a frequency of 1 Hz. Furthermore, in magnetic flux leakage testing, compared with one TMR sensor, the Wheatstone bridge TMR sensors provided a higher signal-to-noise ratio for inspection of a steel bar. The one TMR sensor system could provide a high defect signal due to its high sensitivity at low lift-off (4 cm). However, as a result of its excellent detectivity, the full Wheatstone bridge-based TMR sensor detected the defect even at high lift-off (20 cm). This suggests that the developed TMR sensor provides excellent detectivity, detecting weak field changes in magnetic flux leakage testing.

7.
Sensors (Basel) ; 20(19)2020 Oct 07.
Artículo en Inglés | MEDLINE | ID: mdl-33036470

RESUMEN

Thanks to their high magnetoresistance and integration capability, magnetic tunnel junction-based magnetoresistive sensors are widely utilized to detect weak, low-frequency magnetic fields in a variety of applications. The low detectivity of MTJs is necessary to obtain a high signal-to-noise ratio when detecting small variations in magnetic fields. We fabricated serial MTJ-based sensors with various junction area and free-layer electrode aspect ratios. Our investigation showed that their sensitivity and noise power are affected by the MTJ geometry due to the variation in the magnetic shape anisotropy. Their MR curves demonstrated a decrease in sensitivity with an increase in the aspect ratio of the free-layer electrode, and their noise properties showed that MTJs with larger junction areas exhibit lower noise spectral density in the low-frequency region. All of the sensors were able detect a small AC magnetic field (Hrms = 0.3 Oe at 23 Hz). Among the MTJ sensors we examined, the sensor with a square-free layer and large junction area exhibited a high signal-to-noise ratio (4792 ± 646). These results suggest that MTJ geometrical characteristics play a critical role in enhancing the detectivity of MTJ-based sensors.

8.
Sensors (Basel) ; 19(21)2019 Oct 30.
Artículo en Inglés | MEDLINE | ID: mdl-31671677

RESUMEN

Magnetic flux leakage (MFL) testing is a method of non-destructive testing (NDT), whereby the material is magnetized, and when a defect is present, the magnetic flux lines break out of the material. The magnitude of the leaked magnetic flux decreases as the lift-off (distance from the material) increases. Therefore, for detection at high lift-off, a sensitive magnetic sensor is required. To increase the output sensitivity, this paper proposes the application of magnetic tunnel junction (MTJ) sensors in a bridge circuit for the NDT of reinforced concrete at high lift-off. MTJ sensors were connected to a full-bridge circuit, where one side of the arm has two MTJ sensors connected in series, and the other contains a resistor and a variable resistor. Their responses towards a bias magnetic field were measured, and, based on the results, the sensor circuit sensitivity was 0.135 mV/mT. Finally, a reinforced concrete specimen with a 1 cm gap in the center was detected. The sensor module (with an amplifier and low pass filter circuits) could determine the gap even at 50 cm, suggesting that MTJ sensors have the potential to detect defects at high lift-off values and have a promising future in the field of NDT.

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