RESUMEN
Iterative process improvements have been used to eliminate strength-limiting geometric flaws in mesoscale bend bars composed of yttria-tetragonal zirconia polycrystals (Y-TZP). These improvements led to large quantities of high bend strength material. The metrology of Y-TZP mesoscale bend bars produced using a novel lost mold-rapid infiltration-forming process (LM-RIF) is characterized over several process improvements. These improvements eliminate trapezoidal cross sections in the parts, reduce concave upper surfaces in cross section, and minimize warping along the long axis of 332 x 26 x 17 mum mesoscale bend bars. The trapezoidal cross sections of earlier, first-generation parts were due to the absorption of high-energy ultraviolet (UV) light during the photolithographic mold-forming process, which produced nonvertical mold walls that the parts mirrored. The concave upper surfaces in cross section were eliminated by implementing a RIF-buffing process. Warping during sintering was attributed to impurities in the substrate, which creates localized grain growth and warping as the tetragonal phase becomes destabilized. Precision in the part dimensions is demonstrated using optical profilometry on bend bars and a triangular test component. The bend bar dimensions have a 95% confidence interval of < +/-1 mum, and the tip radius of the triangular test component is 3 mum, consistent with the UV-photolithographic process used to form the mold cavities. The average bend strength of the mesoscale Y-TZP bend exceeds 2 GPa with a Weibull modulus equal to 6.3.
RESUMEN
Free-standing mesoscale (340 mum x 30 mum x 20 mum) bend bars with an aspect ratio over 15:1 and an edge resolution as fine as a single grain diameter ( approximately 400 nm) have been fabricated in large numbers on refractory ceramic substrates by combining a novel powder processing approach with photoresist molds and an innovative lost-mold thermal process. The colloid and interfacial chemistry of the nanoscale zirconia particulates has been modeled and used to prepare highly concentrated suspensions. Engineering solutions to challenges in mold fabrication and casting have yielded free-standing, crack-free parts. Molds are fabricated using high-aspect-ratio photoresist on ceramic substrates. Green parts are formed using a rapid infiltration method that exploits the shear thinning behavior of the highly concentrated ceramic suspension in combination with gelcasting. The mold is thermally decomposed and the parts are sintered in place on the ceramic substrate. Chemically aided attrition milling disperses and concentrates the as-received 3Y-TZP powder to produce a dense, fine-grained sintered microstructure. Initial three-point bend strength data are comparable to that of conventional zirconia; however, geometric irregularities (e.g., trapezoidal cross sections) are present in this first generation and are discussed with respect to the distribution of bend strength.