RESUMEN
Silicon photonic-integrated circuits (PICs) operating in the 2â µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication band (1310/1550â nm). Here we report the realization of a low-loss waveguide and an ultrahigh-Q microring resonator in the 2â µm wave band on a standard 200â mm silicon photonic platform. The single-mode strip waveguide fabricated on a 220â nm-thick silicon device layer has a record-low propagation loss â¼0.2â dB/cm. Based on the low-loss waveguide, we demonstrate an ultrahigh-Q microring resonator with a measured loaded Q-factor as high as 1.1 × 106 and intrinsic Q-factor of 2 × 106, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22â dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2â µm wave band.