Effects of atomic collisions on the stoichiometry of thin films prepared by pulsed laser deposition.
Phys Rev Lett
; 111(3): 036101, 2013 Jul 19.
Article
en En
| MEDLINE
| ID: mdl-23909339
ABSTRACT
We present an analytical model to quantitatively study the effect of collisions between the atoms of a plume and the molecules of a surrounding gas on the nonstoichiometry of lithium-containing oxide thin films deposited using pulsed laser deposition. A comparison of the experimental data and the model ascertain the inevitable loss of the lighter cation, leading to a nonstoichiometric reduction in the content of lighter cations in the films. Our model is the first analytic model of collision-induced plume expansion that can explain the partial oxygen pressure dependence of the Li content of a thin film. These studies have important implications for collision effects that affect the growth of thin films containing both light and heavy elements.
Buscar en Google
Base de datos:
MEDLINE
Idioma:
En
Revista:
Phys Rev Lett
Año:
2013
Tipo del documento:
Article
País de afiliación:
Japón