Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration.

Extreme ultraviolet (EUV) lithography uses reflective optics and a thick mask absorber, leading to mask 3D (M3D) effects. These M3D effects cause disparities in the amplitudes and phases of EUV mask diffractions, impacting mask imaging performance and reducing process yields. Our findings demonstrate that wrinkles in the EUV pellicle can exacerbate M3D effects. This imbalance results in critical dimension variation, image contrast loss, and pattern shift in mask images. Therefore, the use of a pellicle material with thermodynamic characteristics that minimize wrinkles when exposed to EUV rays is imperative.

Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension.

Extreme ultraviolet (EUV) pellicles must have an EUV reflectance (EUVR) below 0.04% to prevent the reduction of critical dimension (CD). However, pellicle wrinkles cause localized CD variation by locally amplifying the EUVR. This study demonstrates that wrinkles can increase the pellicle's EUVR by approximately four times, and the CD drop depends on the relative position of the reflected light from the wrinkle to the 0th- or 1st-order diffracted light. The CD decreases by 6 nm. Therefore, even if the pellicle satisfies the requirement for the EUVR, we need to tightly control the generation of wrinkles to suppress CD variation during the entire exposure process.

Centennial-scale changes in the global carbon cycle during the last deglaciation.

Global climate and the concentration of atmospheric carbon dioxide (CO2) are correlated over recent glacial cycles. The combination of processes responsible for a rise in atmospheric CO2 at the last glacial termination (23,000 to 9,000 years ago), however, remains uncertain. Establishing the timing and rate of CO2 changes in the past provides critical insight into the mechanisms that influence the carbon cycle and helps put present and future anthropogenic emissions in context. Here we present CO2 and methane (CH4) records of the last deglaciation from a new high-accumulation West Antarctic ice core with unprecedented temporal resolution and precise chronology. We show that although low-frequency CO2 variations parallel changes in Antarctic temperature, abrupt CO2 changes occur that have a clear relationship with abrupt climate changes in the Northern Hemisphere. A significant proportion of the direct radiative forcing associated with the rise in atmospheric CO2 occurred in three sudden steps, each of 10 to 15 parts per million. Every step took place in less than two centuries and was followed by no notable change in atmospheric CO2 for about 1,000 to 1,500 years. Slow, millennial-scale ventilation of Southern Ocean CO2-rich, deep-ocean water masses is thought to have been fundamental to the rise in atmospheric CO2 associated with the glacial termination, given the strong covariance of CO2 levels and Antarctic temperatures. Our data establish a contribution from an abrupt, centennial-scale mode of CO2 variability that is not directly related to Antarctic temperature. We suggest that processes operating on centennial timescales, probably involving the Atlantic meridional overturning circulation, seem to be influencing global carbon-cycle dynamics and are at present not widely considered in Earth system models.

Performance of Extreme Ultraviolet Coherent Scattering Microscope.

For the successful implementation of extreme ultraviolet lithography (EUVL) into high-volume manufacturing, the development of a novel structure mask for resolution improvement is essential. In this paper, coherent scattering microscopy (CSM) is introduced as an actinic metrology technique based on coherent diffractive imaging (CDI) for EUV mask development. CDI reconstructs the mask image using diffraction patterns from the mask through mathematical calculations. CSM can analyze details of an EUV mask such as its diffraction efficiency and phase information.

High-Precision Measurement of N2O Concentration in Ice Cores.

Atmospheric nitrous oxide (N2O) is a greenhouse gas and ozone-depleting substance whose emissions are substantially perturbed by current human activities. Although air trapped in polar ice cores can provide direct information about N2O evolution, analytical precision was not previously sufficient for high temporal resolution studies. In this work, we present a highly improved analytical technique with which to study N2O concentrations in ancient-air-trapped ice cores. We adopt a melt-refreezing method to extract air and use a gas chromatography-electron capture detector (GC-ECD) to determine N2O concentrations. The GC conditions are optimized to improve the sensitivity for detecting N2O. Retrapped N2O in ice during the extraction procedure is precisely analyzed and corrected. We confirmed our results using data from the Styx Glacier ice core in Antarctica by comparing them with the results of a dry-extraction method. The precision estimated from the pooled standard deviation of replicated measurements of the Styx ice core was 1.5 ppb for ∼20 g of ice, a smaller sample of ice than was used in previous studies, showing a significant improvement in precision. Our preliminary results from the Styx Glacier ice core samples have the potential to define small N2O variations (a few parts per billion) at centennial time scales.

Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift mask.

The imaging performance of a half-tone phase shift mask (PSM) has been analyzed using coherent scattering microscopy (CSM), which allows analysis of the actinic characteristics of an extreme ultraviolet (EUV) mask such as its reflectivity, diffraction efficiency, and phase information. This paper presents the 1st experimental result showing the effect of 180° phase difference between the absorber and reflector in EUV mask. This reveals that a PSM offers a 46% improvement in 1st/0th diffraction efficiency and 14% improvement in image contrast when compared to a binary intensity mask (BIM). The horizontal-vertical critical dimension (H-V CD) bias is also reduced by 1.37 nm at 22 nm line and space (L/S) patterns. Since the performance of PSM can be evaluated without a wafer patterning process, CSM is expected to be a useful inspection tool for the development of novel EUV masks.

Direct fermentation route for the production of acrylic acid.

There have been growing concerns regarding the limited fossil resources and global climate changes resulting from modern civilization. Currently, finding renewable alternatives to conventional petrochemical processes has become one of the major focus areas of the global chemical industry sector. Since over 4.2 million tons of acrylic acid (AA) is annually employed for the manufacture of various products via petrochemical processes, this chemical has been the target of efforts to replace the petrochemical route by ecofriendly processes. However, there has been limited success in developing an approach combining the biological production of 3-hydroxypropionic acid (3-HP) and its chemical conversion to AA. Here, we report the first direct fermentative route for producing 0.12 g/L of AA from glucose via 3-HP, 3-HP-CoA, and Acryloyl-CoA, leading to a strain of Escherichia coli capable of directly producing acrylic acid. This route was developed through extensive screening of key enzymes and designing a novel metabolic pathway for AA.

Metabolic engineering of 3-hydroxypropionic acid biosynthesis in Escherichia coli.

3-Hydroxypropionic acid (3-HP) can be produced in microorganisms as a versatile platform chemical. However, owing to the toxicity of the intermediate product 3-hydroxypropionaldehyde (3-HPA), the minimization of 3-HPA accumulation is critical for enhancing the productivity of 3-HP. In this study, we identified a novel aldehyde dehydrogenase, GabD4 from Cupriavidus necator, and found that it possessed the highest enzyme activity toward 3-HPA reported to date. To augment the activity of GabD4, several variants were obtained by site-directed and saturation mutagenesis based on homology modeling. Escherichia coli transformed with the mutant GabD4_E209Q/E269Q showed the highest enzyme activity, which was 1.4-fold higher than that of wild type GabD4, and produced up to 71.9 g L(-1) of 3-HP with a productivity of 1.8 g L(-1) h(-1) . To the best of our knowledge, these are the highest 3-HP titer and productivity values among those reported in the literature. Additionally, our study demonstrates that GabD4 can be a key enzyme for the development of industrial 3-HP-producing microbial strains, and provides further insight into the mechanism of aldehyde dehydrogenase activity.

Substrate effects on the transmittance of 1D metal grid transparent electrodes.

The effect of the presence of substrates below metal grids on light transmission is investigated through finite-different time-domain (FDTD) simulations. Comparing grids on substrates with suspended grids, we identify the effects of the presence of substrates on the transmittances of metal grids. The presence of substrates below micron-scale grids has no specific effect on their transmittances; however, unexpected dips and flattened peaks in transmission spectra were observed in nano-scale grids. The figures of merits (FoMs) of metal grids are calculated using estimated transmittances and grid sheet resistances. Due to their lower resistances and higher transmittances, micron-scale grids show higher FoMs than nano-scale grids and, are thus promising transparent conducting electrode candidates. The best 1D grid electrode in this work exhibited a figure of merit, σ(dc)/σ(op), > 1000.

FDTD simulation of transmittance characteristics of one-dimensional conducting electrodes.

We investigated transparent conducting electrodes consisting of periodic one-dimensional Ag or Al grids with widths from 25 nm to 5 µm via the finite-difference time-domain method. To retain high transmittance, two grid configurations with opening ratios of 90% and 95% were simulated. Polarization-dependent characteristics of the transmission spectra revealed that the overall transmittance of micron-scale grid electrodes may be estimated by the sum of light power passing through the uncovered area and the light power penetrating the covered metal layer. However, several dominant physical phenomena significantly affect the transmission spectra of the nanoscale grids: Rayleigh anomaly, transmission decay in TE polarized mode, and localized surface plasmon resonance. We conclude that, for applications of transparent electrodes, the critical feature sizes of conducting 1D grids should not be less than the wavelength scale in order to maintain uniform and predictable transmission spectra and low electrical resistivity.

Dependence of interface charge trapping on channel engineering in pentacene field effect transistors.

We investigate the dependence of charge carrier mobility by trap states at various interface regions through channel engineering. Prior to evaluation of interface trap density, the electrical performance in pentaene field effect transistors (FET) with high-k gate oxide are also investigated depending on four channel engineering. As a channel engineering, gas treatment, coatings of thin polymer layer, and chemical surface modification using small molecules were carried out. After channel engineering, the performance of device as well as interface trap density calculated by conductance method are remarkably improved. It is found that the reduced interface trap density is closely related to decreasing the sub-threshold swing and improving the mobility. Particularly, we also found that performance of device such as mobility, subthreshold swing, and interface trap density after gas same is comparable to those of OTS.

Monolithically Integrated Complementary Ferroelectric FET XNOR Synapse for the Binary Neural Network.

Neuromorphic computing, which mimics the structure and principles of the human brain, has the potential to facilitate the hardware implementation of next-generation artificial intelligence systems and process large amounts of data with very low power consumption. Among them, the XNOR synapse-based Binary Neural Network (BNN) has been attracting attention due to its compact neural network parameter size and low hardware cost. The previous XNOR synapse has drawbacks, such as a trade-off between cell density and accuracy. In this work, we show nonvolatile XNOR synapses with high density and accuracy using a monolithically stacked complementary ferroelectric field-effect transistor (C-FeFET) composed of a p-type Si MFMIS-FeFET at the bottom and a 3D stackable n-type Al:IZTO MFS-FeTFT, achieving 60F2 per cell (2C-FeFET). For adjusting the threshold voltage and improving the switching speed (100 ns) of n-type ferroelectric TFT, we employed a dual-gate configuration and a unique operation scheme, making it comparable to those of Si-based FeFETs. We performed array-level simulation with a 512 × 512 subarray size and a 3-bit flash ADC, demonstrating that the image recognition accuracies using the MNIST and CIFAR-10 data sets were increased by 3.17 and 14.07%, respectively, in comparison to other nonvolatile XNOR synapses. In addition, we performed system-level analysis on a 512 × 512 XNOR C-FeFET, exhibiting an outstanding throughput of 717.37 GOPS and an energy efficiency of 196.7 TOPS/W. We expect that our approach would contribute to the high-density memory systems, logic-in-memory technology, and hardware implementation of neural networks.

NoRSE: noise reduction and state evaluator for high-frequency single event traces.

UNLABELLED: NoRSE was developed to analyze high-frequency datasets collected from multistate, dynamic experiments, such as molecular adsorption and desorption onto carbon nanotubes. As technology improves sampling frequency, these stochastic datasets become increasingly large with faster dynamic events. More efficient algorithms are needed to accurately locate the unique states in each time trace. NoRSE adapts and optimizes a previously published noise reduction algorithm and uses a custom peak flagging routine to rapidly identify unique event states. The algorithm is explained using experimental data from our lab and its fitting accuracy and efficiency are then shown with a generalized model of stochastic datasets. The algorithm is compared to another recently published state finding algorithm and is found to be 27 times faster and more accurate over 55% of the generalized experimental space. NoRSE is written as an M-file for Matlab. AVAILABILITY: http://web.mit.edu/stranogroup/NoRSE.txt.

Fabrication of Al2O3 coated 2D TiO2 nanoparticle photonic crystal layers by reverse nano-imprint lithography and plasma enhanced atomic layer deposition.

This paper reports simple process to enhance the extraction efficiency of photoluminescence (PL) from Eu-doped yttrium oxide (Y2O3:Eu3+) thin-film phosphor (TFP). Two-dimensional (2D) photonic crystal layer (PCL) was fabricated on Y2O3:Eu3+ phosphor films by reverse nano-imprint method using TiO2 nanoparticle solution as a nano-imprint resin and a 2D hole-patterned PDMS stamp. Atomic scale controlled Al2O3 deposition was performed onto this 2D nanoparticle PCL for the optimization of the photonic crystal pattern size and stabilization of TiO2 nanoparticle column structure. As a result, the light extraction efficiency of the Y2O3:Eu3+ phosphor film was improved by 2.0 times compared to the conventional Y2O3:Eu3+ phosphor film.

Fabrication of SiC nanoparticles by physical milling for ink-jet printing.

Here we tried to show the possibility of mechanical milling method for fabrication of SiC nanoparticles and ink-jet printing method to make SiC patterns for use as several applications, e.g., micro hotplates. Planetary milling was employed to fabricate the nano-scale SiC particles from coarse powders. After 100 hours of milling, the size of the SiC particles decreased to about 100 nm, which was sufficient for the formulation of ink for ink-jet printing. The SiC particles were dispersed in an ink system consisted of ethylene glycol and ethanol with a small amount of additives. The ink with SiC nanoparticles could be successfully printed on an alumina substrate by the ink-jet printing method.

Nanolithography on graphene by using scanning tunneling microscopy in a methanol environment.

Since it was discovered in 2004, graphene has attracted enormous attention as an emerging material for future devices, but it has been found that conventional lithographic processes based on polymer resist degrade its intrinsic performance. Recently, our group studied a resist-free scanning tunneling microscopy-based lithography in various atmospheres by injecting volatile liquids into a chamber. In this study, multilayer graphene was scanned and etched by controlling bias voltage under methanol pressure. We focused on improving patterning results in terms of depth and line width, while the previous study was performed to find an optimum gas environment for patterning on a graphite surface. Specifically, we report patterning outputs depending on conditions of voltage, current, and pressure. The optimum conditions for methanol environment etching were a gas pressure in the range of 41-50 torr, a -4 V tip bias, and a 2 nA tunneling current.

Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles.

An extreme ultraviolet (EUV) pellicle is an ultrathin membrane at a stand-off distance from the reticle surface that protects the EUV mask from contamination during the exposure process. EUV pellicles must exhibit high EUV transmittance, low EUV reflectivity, and superior thermomechanical durability that can withstand the gradually increasing EUV source power. This study proposes an optimal range of optical constants to satisfy the EUV pellicle requirements based on the optical simulation results. Based on this, zirconium disilicide (ZrSi2), which is expected to satisfy the optical and thermomechanical requirements, was selected as the EUV pellicle candidate material. An EUV pellicle composite comprising a ZrSi2 thin film deposited via co-sputtering was fabricated, and its thermal, optical, and mechanical properties were evaluated. The emissivity increased with an increase in the thickness of the ZrSi2 thin film. The measured EUV transmittance (92.7%) and reflectivity (0.033%) of the fabricated pellicle satisfied the EUV pellicle requirements. The ultimate tensile strength of the pellicle was 3.5 GPa. Thus, the applicability of the ZrSi2 thin film as an EUV pellicle material was verified.

Sulfur isotope-based source apportionment and control mechanisms of PM2.5 sulfate in Seoul, South Korea during winter and early spring (2017-2020).

High level of particulate matter (PM) concentrations are a major environmental concern in Seoul, South Korea, especially during winter and early spring. Sulfate is a major component of PM and induces severe environmental pollution, such as acid precipitation. Previous studies have used numerical models to constrain the relative contributions of domestic and trans-boundary sources to PM2.5 sulfate concentration in South Korea. Because of the scarce measurement result of δ34S for PM2.5 sulfate in South Korea, poorly defined δ34S value of domestic sulfur sources, and no application of sulfur isotope fractionation during sulfate formation in previous observation-based studies, source apportionment results conducted by model studies have not been corroborated from independent chemical observations. Here, we examined the δ34S of PM2.5 in Seoul and domestic sulfur sources, and considered the sulfur isotope fractionation for accurate source apportionment constraint. Accordingly, domestic and trans-boundary sulfur sources accounted for approximately (16-32) % and (68-84) % of the sulfate aerosols in Seoul, respectively, throughout the winter and early spring of 2017-2020. Air masses passing through north-eastern China had relatively low sulfate concentrations, enriched δ34S, and a low domestic source contribution. Those passing through south-eastern China had relatively a high sulfate concentrations, depleted δ34S, and high domestic source contribution. Furthermore, elevated PM2.5 sulfate concentrations (>10 µg m-3) were exclusively associated with a weak westerly wind speed of <3 m s-1. From December 2019 to March 2020, Seoul experienced relatively low levels of PM2.5 sulfate, which might be attributed to favorable weather conditions rather than the effects of COVID-19 containment measures. Our results demonstrate the potential use of δ34S for accurate source apportionment and for identifying the crucial role of regional air mass transport and meteorological conditions in PM2.5 sulfate concentration. Furthermore, the data provided can be essential for relevant studies and policy-making in East Asia.

Fossil and non-fossil sources of the carbonaceous component of PM2.5 in forest and urban areas.

Atmospheric particulate matter (PM2.5) can damage human health. Biogenic organic compounds emitted from trees may increase the concentration of PM2.5 via formation of secondary aerosols. Therefore, the role of biogenic emissions in PM2.5 formation and the sources of PM2.5 need to be investigated. Dual carbon isotope and levoglucosan analyses are powerful tools to track the sources of total carbon (TC) in PM2.5. We collected a total of 47 PM2.5 samples from 2019 to 2020 inside a pine forest and in urban areas in South Korea. The average δ13C and Δ14C of TC in PM2.5 at the Taehwa Research Forest (TRF) were - 25.7 and - 380.7‰, respectively, which were not significantly different from those collected at Seoul National University (SNU) in urban areas. Contribution of fossil fuel, C3-, and C4- plants to carbonaceous component of PM2.5 were 52, 27, and 21% at SNU, whereas those were 46, 35, and 19% at TRF, respectively. The biomass burning tracer, levoglucosan, was most abundant in winter and correlated with the contribution of C4 plants derived carbon. Results indicate that biogenic aerosols emitted from trees is less likely to be an important source of PM2.5 and that trees can act as a bio-filter to reduce PM2.5.

Structure and function of glucose binding protein-single walled carbon nanotube complexes.

Understanding the structure and function of glucose binding proteins (GBP) complexed with single walled carbon nanotubes (SWNTs) is important for the development of applications including fluorescent sensors and nanostructure particle tracking. Herein, circular dichroism (CD), thermal denaturation, photo-absorption spectroscopy and atomic force microscopy are used to study these nanostructures. The protein retains its glucose-binding activity after complexation and is thermally stable below 36 °C. However, the SWNT lowers the midpoint denaturation temperature (Tm) by 5 °C and 4 °C in the absence and presence of 10 mM glucose, respectively. This data highlights that using techniques such as CD and thermal denaturation may be necessary to fully characterize such protein-nanomaterial nanostructures.