Vertical MoS2 transistors with sub-1-nm gate lengths.

Ultra-scaled transistors are of interest in the development of next-generation electronic devices1-3. Although atomically thin molybdenum disulfide (MoS2) transistors have been reported4, the fabrication of devices with gate lengths below 1 nm has been challenging5. Here we demonstrate side-wall MoS2 transistors with an atomically thin channel and a physical gate length of sub-1 nm using the edge of a graphene layer as the gate electrode. The approach uses large-area graphene and MoS2 films grown by chemical vapour deposition for the fabrication of side-wall transistors on a 2-inch wafer. These devices have On/Off ratios up to 1.02 × 105 and subthreshold swing values down to 117 mV dec-1. Simulation results indicate that the MoS2 side-wall effective channel length approaches 0.34 nm in the On state and 4.54 nm in the Off state. This work can promote Moore's law of the scaling down of transistors for next-generation electronics.

Programmable Ferroelectricity in Hf0.5Zr0.5O2 Enabled by Oxygen Defect Engineering.

Ferroelectricity, especially the Si-compatible type recently observed in hafnia-based materials, is technologically useful for modern memory and logic applications, but it is challenging to differentiate intrinsic ferroelectric polarization from the polar phase and oxygen vacancy. Here, we report electrically controllable ferroelectricity in a Hf0.5Zr0.5O2-based heterostructure with Sr-doped LaMnO3, a mixed ionic-electronic conductor, as an electrode. Electrically reversible extraction and insertion of an oxygen vacancy into Hf0.5Zr0.5O2 are macroscopically characterized and atomically imaged in situ. Utilizing this reversible process, we achieved multilevel polarization states modulated by the electric field. Our study demonstrates the usefulness of the mixed conductor to repair, create, manipulate, and utilize advanced ferroelectric functionality. Furthermore, the programmed ferroelectric heterostructures with Si-compatible doped hafnia are desirable for the development of future ferroelectric electronics.

PZT-Enabled MoS2 Floating Gate Transistors: Overcoming Boltzmann Tyranny and Achieving Ultralow Energy Consumption for High-Accuracy Neuromorphic Computing.

Low-power electronic devices play a pivotal role in the burgeoning artificial intelligence era. The study of such devices encompasses low-subthreshold swing (SS) transistors and neuromorphic devices. However, conventional field-effect transistors (FETs) face the inherent limitation of the "Boltzmann tyranny", which restricts SS to 60 mV decade-1 at room temperature. Additionally, FET-based neuromorphic devices lack sufficient conductance states for highly accurate neuromorphic computing due to a narrow memory window. In this study, we propose a pioneering PZT-enabled MoS2 floating gate transistor (PFGT) configuration, demonstrating a low SS of 46 mV decade-1 and a wide memory window of 7.2 V in the dual-sweeping gate voltage range from -7 to 7 V. The wide memory window provides 112 distinct conductance states for PFGT. Moreover, the PFGT-based artificial neural network achieves an outstanding facial-recognition accuracy of 97.3%. This study lays the groundwork for the development of low-SS transistors and highly energy efficient artificial synapses utilizing two-dimensional materials.

Overtone Mass Sensitivity of Quartz Crystal Microbalance Sensor with Asymmetric N-M Type Electrode Configuration.

Sensing sensitivity is one of the crucial parameters for quartz crystal microbalance (QCM) sensors. Herein, we study the overtone mass sensitivity of a QCM sensor with an asymmetric N-M type electrode configuration. In order to overcome the deficiency that the sensitivity of the QCM sensor with an asymmetric electrode cannot be calculated by Sauerbrey's equation, we design the electrochemical electrodeposition experiments to measure it. The measurement results of overtone mass sensitivities of three 3.1-5.1 and three 4.1-5.1 QCMs are 5.418, 5.629, and 5.572 Hz/ng and 4.155, 4.456, and 3.982 Hz/ng in the third overtone mode and 9.208, 9.474, and 9.243 Hz/ng and 6.811, 7.604, and 6.588 Hz/ng in the fifth overtone mode, respectively. The overtone mass sensitivities of three 5.1-5.1 QCMs are 3.210, 3.439, and 3.540 Hz/ng in the third overtone mode and 5.396, 5.010, and 5.707 Hz/ng in the fifth overtone mode, respectively. These results show that the overtone mass sensitivity of the N-M type QCM is larger than that of QCMs with symmetric electrodes, and the fifth overtone mass sensitivity is higher than the third overtone mass sensitivity for the same type of QCM. The above results strongly confirm that the overtone mass sensitivity of a QCM sensor with an asymmetric N-M electrode structure significantly enhances its sensing performance, and it will greatly meet the demands for high precision measurement of QCM sensors in applications.

High sensitivity graphene based health sensor with self-warning function.

In order to reduce the damage to people's health from diseases that attack the respiratory system such as COVID-19, asthma, and pneumonia, it is desired that patients' breathing can be monitored and alerted in real-time. The emergence of wearable health detection sensing devices has provided a relatively good response to this problem. However, there are still problems such as complex structure and poor performance. This paper introduces a laser-induced graphene (LIG) device that is attached to PDMS. The LIG is produced by laser irradiation of Nomex and subsequently transferred and attached to the PDMS. After being tested, it has demonstrated high sensitivity, stable tensile performance, good acoustic performance, excellent thermal stability, and other favorable properties. Notably, its gauge factor (GF) value can reach 721.67, which is quite impressive. Additionally, it is capable of emitting an alarm sound with an SPL close to 60 dB when receiving signals within the range of 5-20 kHz. The device realizes mechanical sensing and acoustic functions in one chip, and has a high application value in applications that need to combine sensing and early warning.

Recent Progress of Tactile and Force Sensors for Human-Machine Interaction.

Human-Machine Interface (HMI) plays a key role in the interaction between people and machines, which allows people to easily and intuitively control the machine and immersively experience the virtual world of the meta-universe by virtual reality/augmented reality (VR/AR) technology. Currently, wearable skin-integrated tactile and force sensors are widely used in immersive human-machine interactions due to their ultra-thin, ultra-soft, conformal characteristics. In this paper, the recent progress of tactile and force sensors used in HMI are reviewed, including piezoresistive, capacitive, piezoelectric, triboelectric, and other sensors. Then, this paper discusses how to improve the performance of tactile and force sensors for HMI. Next, this paper summarizes the HMI for dexterous robotic manipulation and VR/AR applications. Finally, this paper summarizes and proposes the future development trend of HMI.

Biocompatible and Long-Term Monitoring Strategies of Wearable, Ingestible and Implantable Biosensors: Reform the Next Generation Healthcare.

Sensors enable the detection of physiological indicators and pathological markers to assist in the diagnosis, treatment, and long-term monitoring of diseases, in addition to playing an essential role in the observation and evaluation of physiological activities. The development of modern medical activities cannot be separated from the precise detection, reliable acquisition, and intelligent analysis of human body information. Therefore, sensors have become the core of new-generation health technologies along with the Internet of Things (IoTs) and artificial intelligence (AI). Previous research on the sensing of human information has conferred many superior properties on sensors, of which biocompatibility is one of the most important. Recently, biocompatible biosensors have developed rapidly to provide the possibility for the long-term and in-situ monitoring of physiological information. In this review, we summarize the ideal features and engineering realization strategies of three different types of biocompatible biosensors, including wearable, ingestible, and implantable sensors from the level of sensor designing and application. Additionally, the detection targets of the biosensors are further divided into vital life parameters (e.g., body temperature, heart rate, blood pressure, and respiratory rate), biochemical indicators, as well as physical and physiological parameters based on the clinical needs. In this review, starting from the emerging concept of next-generation diagnostics and healthcare technologies, we discuss how biocompatible sensors revolutionize the state-of-art healthcare system unprecedentedly, as well as the challenges and opportunities faced in the future development of biocompatible health sensors.

Exploration of the Mass Sensitivity of Quartz Crystal Microbalance under Overtone Modes Using Electrodeposition Method.

With the in-depth application of quartz crystal microbalance (QCM) sensors in the fields of science and engineering, there is an urgent need for QCM sensors with high mass sensitivity. The mass sensitivity of a QCM is closely related to its resonance frequency, and the high resonance frequency leads to improve its mass sensitivity. However, the resonance frequency of a QCM resonator cannot be increased all the time due to the fragility of quartz wafer and the limits of energy trapping effect. Few studies are associated with mass sensitivity of a QCM resonator under overtone modes. Herein, we propose to make a QCM resonator work in its n-th overtone (n = 3, 5, 7, 9 in this study) mode to increase its resonance frequency during operating. Thereby, the purpose of improving QCM mass sensitivity is achieved, and the mass sensitivity of a QCM working in the n-th overtone mode can be called as n-th overtone mass sensitivity. Then, the n-th overtone mass sensitivity of a QCM sensor is measured by an electrodeposition method. The experimental results show that the n-th overtone mass sensitivity of a QCM is a bit more than n times that of the fundamental mass sensitivity, and it is consistent with the theoretical calculation results. The application of overtone mass sensitivity will greatly improve the sensitivity of QCM sensors, which is very attractive for the research fields that require QCM sensors with high sensitivity.

Intelligent and Multifunctional Graphene Nanomesh Electronic Skin with High Comfort.

As the aging population increases in many countries, electronic skin (e-skin) for health monitoring has been attracting much attention. However, to realize the industrialization of e-skin, two factors must be optimized. The first is to achieve high comfort, which can significantly improve the user experience. The second is to make the e-skin intelligent, so it can detect and analyze physiological signals at the same time. In this article, intelligent and multifunctional e-skin consisting of laser-scribed graphene and polyurethane (PU) nanomesh is realized with high comfort. The e-skin can be used as a strain sensor with large measurement range (>60%), good sensitivity (GF≈40), high linearity range (60%), and excellent stability (>1000 cycles). By analyzing the morphology of e-skin, a parallel networks model is proposed to express the mechanism of the strain sensor. In addition, laser scribing is also applied to etch the insulating PU, which greatly decreases the impedance in detecting electrophysiology signals. Finally, the e-skin is applied to monitor the electrocardiogram, electroencephalogram (EEG), and electrooculogram signals. A time- and frequency-domain concatenated convolution neural network is built to analyze the EEG signal detected using the e-skin on the forehead and classify the attention level of testers.

Ultrasensitive Detection of COVID-19 Causative Virus (SARS-CoV-2) Spike Protein Using Laser Induced Graphene Field-Effect Transistor.

COVID-19 is a highly contagious human infectious disease caused by the severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2), and the war with the virus is still underway. Since no specific drugs have been made available yet and there is an imbalance between supply and demand for vaccines, early diagnosis and isolation are essential to control the outbreak. Current nucleic acid testing methods require high sample quality and laboratory conditions, which cannot meet flexible applications. Here, we report a laser-induced graphene field-effect transistor (LIG-FET) for detecting SARS-CoV-2. The FET was manufactured by different reduction degree LIG, with an oyster reef-like porous graphene channel to enrich the binding point between the virus protein and sensing area. After immobilizing specific antibodies in the channel, the FET can detect the SARS-CoV-2 spike protein in 15 min at a concentration of 1 pg/mL in phosphate-buffered saline (PBS) and 1 ng/mL in human serum. In addition, the sensor shows great specificity to the spike protein of SARS-CoV-2. Our sensors can realize fast production for COVID-19 rapid testing, as each LIG-FET can be fabricated by a laser platform in seconds. It is the first time that LIG has realized a virus sensing FET without any sample pretreatment or labeling, which paves the way for low-cost and rapid detection of COVID-19.

Wearable Electronics Based on 2D Materials for Human Physiological Information Detection.

Recently, advancement in materials production, device fabrication, and flexible circuit has led to the huge prosperity of wearable electronics for human healthcare monitoring and medical diagnosis. Particularly, with the emergence of 2D materials many merits including light weight, high stretchability, excellent biocompatibility, and high performance are used for those potential applications. Thus, it is urgent to review the wearable electronics based on 2D materials for the detection of various human signals. In this work, the typical graphene-based materials, transition-metal dichalcogenides, and transition metal carbides or carbonitrides used for the wearable electronics are discussed. To well understand the human physiological information, it is divided into two dominated categories, namely, the human physical and the human chemical signals. The monitoring of body temperature, electrograms, subtle signals, and limb motions is described for the physical signals while the detection of body fluid including sweat, breathing gas, and saliva is reviewed for the chemical signals. Recent progress and development toward those specific utilizations are highlighted in the Review with the representative examples. The future outlook of wearable healthcare techniques is briefly discussed for their commercialization.

Interface Engineering with MoS2 -Pd Nanoparticles Hybrid Structure for a Low Voltage Resistive Switching Memory.

Metal oxide-based resistive random access memory (RRAM) has attracted a lot of attention for its scalability, temperature robustness, and potential to achieve machine learning. However, a thick oxide layer results in relatively high program voltage while a thin one causes large leakage current and a small window. Owing to these fundamental limitations, by optimizing the oxide layer itself a novel interface engineering idea is proposed to reduce the programming voltage, increase the uniformity and on/off ratio. According to this idea, a molybdenum disulfide (MoS2 )-palladium nanoparticles hybrid structure is used to engineer the oxide/electrode interface of hafnium oxide (HfOx )-based RRAM. Through its interface engineering, the set voltage can be greatly lowered (from -3.5 to -0.8 V) with better uniformity under a relatively thick HfOx layer (≈15 nm), and a 30 times improvement of the memory window can be obtained. Moreover, due to the atomic thickness of MoS2 film and high transmittance of ITO, the proposed RRAM exhibits high transparency in visible light. As the proposed interface-engineering RRAM exhibits good transparency, low SET voltage, and a large resistive switching window, it has huge potential in data storage in transparent circuits and wearable electronics with relatively low supply voltage.

A Review on Bacteriorhodopsin-Based Bioelectronic Devices.

Bacteriorhodopsin protein extracted from Halobacterium salinarum is widely used in many biohybrid electronic devices and forms a research subject known as bioelectronics, which merges biology with electronic technique. The specific molecule structure and components of bR lead to its unique photocycle characteristic, which consists of several intermediates (bR, K, L, M, N, and O) and results in proton pump function. In this review, working principles and properties of bacteriorhodopsin are briefly introduced, as well as bR layer preparation method. After that, different bR-based devices divided into photochemical and photoelectric applications are shown. Finally, outlook and conclusions are drawn to inspire new design of high-performance bR-based biohybrid electronic devices.

A Miniaturized Colorimeter with a Novel Design and High Precision for Photometric Detection.

Water quality detection plays an increasingly important role in environmental protection. In this work, a novel colorimeter based on the Beer-Lambert law was designed for chemical element detection in water with high precision and miniaturized structure. As an example, the colorimeter can detect phosphorus, which was accomplished in this article to evaluate the performance. Simultaneously, a modified algorithm was applied to extend the linear measurable range. The colorimeter encompassed a near infrared laser source, a microflow cell based on microfluidic technology and a light-sensitive detector, then Micro-Electro-Mechanical System (MEMS) processing technology was used to form a stable integrated structure. Experiments were performed based on the ammonium molybdate spectrophotometric method, including the preparation of phosphorus standard solution, reducing agent, chromogenic agent and color reaction. The device can obtain a wide linear response range (0.05 mg/L up to 7.60 mg/L), a wide reliable measuring range up to 10.16 mg/L after using a novel algorithm, and a low limit of detection (0.02 mg/L). The size of flow cell in this design is 18 mm × 2.0 mm × 800 µm, obtaining a low reagent consumption of 0.004 mg ascorbic acid and 0.011 mg ammonium molybdate per determination. Achieving these advantages of miniaturized volume, high precision and low cost, the design can also be used in automated in situ detection.

A Miniaturized On-Chip Colorimeter for Detecting NPK Elements.

Recently, precision agriculture has become a globally attractive topic. As one of the most important factors, the soil nutrients play an important role in estimating the development of precision agriculture. Detecting the content of nitrogen, phosphorus and potassium (NPK) elements more efficiently is one of the key issues. In this paper, a novel chip-level colorimeter was fabricated to detect the NPK elements for the first time. A light source-microchannel photodetector in a sandwich structure was designed to realize on-chip detection. Compared with a commercial colorimeter, all key parts are based on MEMS (Micro-Electro-Mechanical System) technology so that the volume of this on-chip colorimeter can be minimized. Besides, less error and high precision are achieved. The cost of this colorimeter is two orders of magnitude less than that of a commercial one. All these advantages enable a low-cost and high-precision sensing operation in a monitoring network. The colorimeter developed herein has bright prospects for environmental and biological applications.

Graphene Dynamic Synapse with Modulatable Plasticity.

The synaptic activities in the nervous system is the basis of memory and learning behaviors, and the concept of biological synapse has also spurred the development of neuromorphic engineering. In recent years, the hardware implementation of the biological synapse has been achieved based on CMOS circuits, resistive switching memory, and field effect transistors with ionic dielectrics. However, the artificial synapse with regulatable plasticity has never been realized of the device level. Here, an artificial dynamic synapse based on twisted bilayer graphene is demonstrated with tunable plasticity. Due to the ambipolar conductance of graphene, both behaviors of the excitatory synapse and the inhibitory synapse could be realized in a single device. Moreover, the synaptic plasticity could also be modulated by tuning the carrier density of graphene. Because the artificial synapse here could be regulated and inverted via changing the bottom gate voltage, the whole process of synapse development could be imitated. Hence, this work would offer a broad new vista for the 2D material electronics and guide the innovation of neuro-electronics fundamentally.

A pressure sensing system for heart rate monitoring with polymer-based pressure sensors and an anti-interference post processing circuit.

Heart rate measurement is a basic and important issue for either medical diagnosis or daily health monitoring. In this work great efforts have been focused on realizing a portable, comfortable and low cost solution for long-term domestic heart rate monitoring. A tiny but efficient measurement system composed of a polymer-based flexible pressure sensor and an analog anti-interference readout circuit is proposed; manufactured and tested. The proposed polymer-based pressure sensor has a linear response and high sensitivity of 13.4 kPa-1. With the circuit's outstanding capability in removing interference caused by body movement and the highly sensitive flexible sensor device, comfortable long-term heart rate monitoring becomes more realistic. Comparative tests prove that the proposed system has equivalent capability (accuracy: <3%) in heart rate measurement to the commercial product.

A flexible ultrasound transducer array with micro-machined bulk PZT.

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

Large-area, transparent, and flexible infrared photodetector fabricated using P-N junctions formed by N-doping chemical vapor deposition grown graphene.

Graphene is a highly promising material for high speed, broadband, and multicolor photodetection. Because of its lack of bandgap, individually gated P- and N-regions are needed to fabricate photodetectors. Here we report a technique for making a large-area photodetector on the basis of controllable fabrication of graphene P-N junctions. Our selectively doped chemical vapor deposition (CVD) graphene photodetector showed a ∼5% modulation of conductance under global IR irradiation. By comparing devices of various geometries, we identify that both the homogeneous and the P-N junction regions contribute competitively to the photoresponse. Furthermore, we demonstrate that our two-terminal graphene photodetector can be fabricated on both transparent and flexible substrates without the need for complex fabrication processes used in electrically gated three-terminal devices. This represents the first demonstration of a fully transparent and flexible graphene-based IR photodetector that exhibits both good photoresponsivity and high bending capability. This simple approach should facilitate the development of next generation high-performance IR photodetectors.