Chemical Gas Sensors: Recent Developments, Challenges, and the Potential of Machine Learning-A Review.

Nowadays, there is increasing interest in fast, accurate, and highly sensitive smart gas sensors with excellent selectivity boosted by the high demand for environmental safety and healthcare applications. Significant research has been conducted to develop sensors based on novel highly sensitive and selective materials. Computational and experimental studies have been explored in order to identify the key factors in providing the maximum active location for gas molecule adsorption including bandgap tuning through nanostructures, metal/metal oxide catalytic reactions, and nano junction formations. However, there are still great challenges, specifically in terms of selectivity, which raises the need for combining interdisciplinary fields to build smarter and high-performance gas/chemical sensing devices. This review discusses current major gas sensing performance-enhancing methods, their advantages, and limitations, especially in terms of selectivity and long-term stability. The discussion then establishes a case for the use of smart machine learning techniques, which offer effective data processing approaches, for the development of highly selective smart gas sensors. We highlight the effectiveness of static, dynamic, and frequency domain feature extraction techniques. Additionally, cross-validation methods are also covered; in particular, the manipulation of the k-fold cross-validation is discussed to accurately train a model according to the available datasets. We summarize different chemresistive and FET gas sensors and highlight their shortcomings, and then propose the potential of machine learning as a possible and feasible option. The review concludes that machine learning can be very promising in terms of building the future generation of smart, sensitive, and selective sensors.

Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection.

The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

Simple fall criteria for MEMS sensors: data analysis and sensor concept.

This paper presents a new and simple fall detection concept based on detailed experimental data of human falling and the activities of daily living (ADLs). Establishing appropriate fall algorithms compatible with MEMS sensors requires detailed data on falls and ADLs that indicate clearly the variations of the kinematics at the possible sensor node location on the human body, such as hip, head, and chest. Currently, there is a lack of data on the exact direction and magnitude of each acceleration component associated with these node locations. This is crucial for MEMS structures, which have inertia elements very close to the substrate and are capacitively biased, and hence, are very sensitive to the direction of motion whether it is toward or away from the substrate. This work presents detailed data of the acceleration components on various locations on the human body during various kinds of falls and ADLs. A two-degree-of-freedom model is used to help interpret the experimental data. An algorithm for fall detection based on MEMS switches is then established. A new sensing concept based on the algorithm is proposed. The concept is based on employing several inertia sensors, which are triggered simultaneously, as electrical switches connected in series, upon receiving a true fall signal. In the case of everyday life activities, some or no switches will be triggered resulting in an open circuit configuration, thereby preventing false positive. Lumped-parameter model is presented for the device and preliminary simulation results are presented illustrating the new device concept.

Theoretical prediction of experimental jump and pull-in dynamics in a MEMS sensor.

The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the resonant branch. They mainly concern the practical range of existence of each attractor and the final outcome after its disappearance. These differences are likely due to disturbances, which are unavoidable in practice, but have not been included in the model. To take disturbances into account, in addition to the classical local investigations, we consider the global dynamics and explore the robustness of the obtained results by performing a dynamical integrity analysis. Our aim is that of developing an applicable confident estimate of the system response. Integrity profiles and integrity charts are built to detect the parameter range where reliability is practically strong and where it becomes weak. Integrity curves exactly follow the experimental data. They inform about the practical range of actuality. We discuss the combined use of integrity charts in the engineering design. Although we refer to a particular case-study, the approach is very general.

Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch.

This paper presents a tunable multi-threshold micro-electromechanical inertial switch with adjustable threshold capability. The demonstrated device combines the advantages of accelerometers in providing quantitative acceleration measurements and g-threshold switches in saving power when in the inactive state upon experiencing acceleration below the thresholds. The designed proof-of-concept device with two thresholds consists of a cantilever microbeam and two stationary electrodes placed at different positions in the sensing direction. The adjustable threshold capability and the effect of the shock duration on the threshold acceleration are analytically investigated using a nonlinear beam model. Results are shown for the relationships among the applied bias voltage, the duration of shock impact, and the tunable threshold. The fabricated prototypes are tested using a shock-table system. The analytical results agree with the experimental results. The designed device concept is very promising for the classification of the shock and impact loads in transportation and healthcare applications.

Nonlinear mode saturation in a U-shaped micro-resonator.

Saturation is an intriguing phenomenon that has captured the attention of scientists since the time of Froude when he reported it for ship motion in the mid of the nineteenth century. This work presents the demonstration and a comprehensive study of the nonlinear saturation phenomenon on a compound micromachined structure of U-shape (micro portal frame). The frame is designed and fabricated as a multi-input and multi-output device for actuating the 1st (sway) and 2nd (symmetric) in-plane vibration modes. Geometric nonlinearities along with the softening effect of the electrostatic force present the necessary conditions for the activation of a 2:1 internal (auto-parametric) resonance between the 1st and 2nd modes. Experimental data complemented with analytical simulations are obtained showing the internal resonance and the saturation phenomenon. These results are promising for further exploration of such compound structures and for further in-depth studies of the saturation phenomenon on a variety of other systems and applications.

Selective multiple analyte detection using multi-mode excitation of a MEMS resonator.

This work reports highly selective multiple analyte detection by exploiting two different mechanisms; absorption and thermal conductivity using a single MEMS device. To illustrate the concept, we utilize a resonator composed of a clamped-guided arch beam connected to a flexural beam and a T-shaped moveable mass. A finite element model is used to study the mode shapes and mechanical behavior of the device with good agreement reported with the experimental data. The resonator displays two distinct out-of-plane modes of vibration. For humidity detection, we utilize physisorption by functionalizing the surface with graphene oxide (GO), which has strong affinity toward water vapors. The GO solution is prepared and drop-casted over the mass surface using an inkjet printer. On the other hand, cooling the heated flexural beams is used for helium (He) detection (thermal-conductivity-based sensor). The sensor characteristics are extensively studied when the modes are individually and simultaneously actuated. Results affirm the successful utilization of each mode for selective detection of relative humidity and He. This novel mode-dependent selective detection of multiple analytes can be a promising building block for the development of miniature, low-powered, and selective smart sensors for modern portable electronic devices.

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations.

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin's expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode's configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators.

Highly sensitive low field Lorentz-force MEMS magnetometer.

We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based on measuring the resonance frequency of the micro-beam around the buckling zone to sense out-of-plane magnetic fields. When biased with a current of 0.91 mA (around buckling), the device has a measured sensitivity of 11.6 T-1, which is five orders of magnitude larger than the state-of-the-art. The measured minimum detectable magnetic field and the estimated resolution of the proposed magnetic sensor are 100 µT and 13.6 µT.Hz-1/2, respectively. An analytical model is developed based on the Euler-Bernoulli beam theory and the Galerkin discretization to understand and verify the micro-sensor performance. Good agreement is shown between analytical results and experimental data. Furthermore, the presented magnetometer is promising for measuring very weak biomagnetic fields.

Characterization for the performance of capacitive switches activated by mechanical shock.

This paper presents experimental and theoretical investigation of a new concept of switches (triggers) that are actuated at or beyond a specific level of mechanical shock or acceleration. The principle of operation of the switches is based on dynamic pull-in instability induced by the combined interaction between electrostatic and mechanical shock forces. These switches can be tuned to be activated at various shock and acceleration thresholds by adjusting the DC voltage bias. Two commercial off-the-shelf capacitive accelerometers operating in air are tested under mechanical shock and electrostatic loading. A single-degree-of-freedom model accounting for squeeze-film damping, electrostatic forces, and mechanical shock is utilized for the theoretical investigation. Good agreement is found between simulation results and experimental data. Our results indicate that designing these new switches to respond quasi-statically to mechanical shock makes them robust against variations in shock shape and duration. More importantly, quasi-static operation makes the switches insensitive to variations in damping conditions. This can be promising to lower the cost of packaging for these switches since they can operate in atmospheric pressure with no hermetic sealing or costly package required.

Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters.

We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.

Tunable nanoelectromechanical resonator for logic computations.

There has been remarkable interest in nanomechanical computing elements that can potentially lead to a new era in computation due to their re-configurability, high integration density, and high switching speed. Here we present a nanomechanical device capable of dynamically performing logic operations (NOR, NOT, XNOR, XOR, and AND). The concept is based on the active tuning of the resonance frequency of a doubly-clamped nanoelectromechanical beam resonator through electro-thermal actuation. The performance of this re-configurable logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations. The proposed device can potentially achieve switching rate in µs, switching energy in nJ, and an integration density up to 106 per cm2. The practical realization of this re-configurable device paves the way for nano-element-based mechanical computing.

Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces.

There is strong experimental evidence for the existence of strange modes of failure of microelectromechanical systems (MEMS) devices under mechanical shock and impact. Such failures have not been explained with conventional models of MEMS. These failures are characterized by overlaps between moving microstructures and stationary electrodes, which cause electrical shorts. This work presents modeling and simulation of MEMS devices under the combination of shock loads and electrostatic actuation, which sheds light on the influence of these forces on the pull-in instability. Our results indicate that the reported strange failures can be attributed to early dynamic pull-in instability. The results show that the combination of a shock load and an electrostatic actuation makes the instability threshold much lower than the threshold predicted, considering the effect of shock alone or electrostatic actuation alone. In this work, a single-degree-of-freedom model is utilized to investigate the effect of the shock-electrostatic interaction on the response of MEMS devices. Then, a reduced-order model is used to demonstrate the effect of this interaction on MEMS devices employing cantilever and clamped-clamped microbeams. The results of the reduced-order model are verified by comparing with finite-element predictions. It is shown that the shock-electrostatic interaction can be used to design smart MEMS switches triggered at a predetermined level of shock and acceleration.

Tunable Resonators for Nonlinear Modal Interactions.

Understanding the various mechanisms of nonlinear mode coupling in micro and nano resonators has become an imminent necessity for their successful implementation in practical applications. However, consistent, repeatable, and flexible experimental procedures to produce nonlinear mode coupling are lacking, and hence research into well-controlled experimental conditions is crucial. Here, we demonstrate well-controlled and repeatable experiments to study nonlinear mode coupling among micro and nano beam resonators. Such experimental approach can be applied to other micro and nano structures to help study their nonlinear interactions and exploit them for higher sensitive and less noisy responses. Using electrothermal tuning and electrostatic excitation, we demonstrate three different kinds of nonlinear interactions among the first and third bending modes of vibrations of slightly curved beams (arches): two-one internal resonance, three-one internal resonance, and mode veering (near crossing). The experimental procedure is repeatable, highly flexible, do not require special or precise fabrication, and is conducted in air and at room temperature. This approach can be applied to other micro and nano structures, which come naturally curved due to fabrication imperfections, such as CNTs, and hence lays the foundation to deeply investigate the nonlinear mode coupling in these structures in a consistent way.

Multifrequency excitation of a clamped-clamped microbeam: Analytical and experimental investigation.

Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped-clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.

In-Plane MEMS Shallow Arch Beam for Mechanical Memory.

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped⁻clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.