Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer.
Opt Express
; 20(18): 19868-81, 2012 Aug 27.
Article
em En
| MEDLINE
| ID: mdl-23037039
ABSTRACT
A quantitative phase shifting differential interference contrast (PS-DIC) shearing interferometer is adopted to measure the profile of transparent specimen with inclined surface. The effects of the incline angle on DIC measurement accuracy were studied. The optical model of the test system was constructed and the measurement of surface with various incline angles ranging from 5° to 60° was simulated. The experiments validate the simulation model and show the feasibility of profile reconstruction of inclined structure. It is interested to find that even with an inclined angle of 15°, unwrapping technique is required to make the measurement more accurate. In addition, the measurement can be further improved by taking into account the effects of the change in shear distance on the optical path difference. This study provides useful information that should be considered for complex geometry measurement with quantitative DIC technique.
Texto completo:
1
Base de dados:
MEDLINE
Assunto principal:
Refratometria
/
Teste de Materiais
/
Interferometria
/
Manufaturas
Idioma:
En
Ano de publicação:
2012
Tipo de documento:
Article
País de afiliação:
Taiwan