Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter.
Opt Lett
; 40(15): 3556-9, 2015 Aug 01.
Article
em En
| MEDLINE
| ID: mdl-26258356
ABSTRACT
We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62 pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters.
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MEDLINE
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En
Ano de publicação:
2015
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Article