Depth-resolved compositional analysis of W/B<sub>4</sub>C multilayers using resonant soft X-ray reflectivity.

Rao, P N; Goutam, U K; Kumar, Prabhat; Gupta, Mukul; Ganguli, Tapas; Rai, S K

Depth-resolved compositional analysis of W/B₄C multilayers using resonant soft X-ray reflectivity.

Rao, P N; Goutam, U K; Kumar, Prabhat; Gupta, Mukul; Ganguli, Tapas; Rai, S K.

Afiliação

Rao PN; Synchrotrons Utilization Section, Raja Ramanna Centre for Advanced Technology, Indore 452013, India.
Goutam UK; Technical Physics Division, Bhabha Atomic Research Center, Trombay, Mumbai 400094, India.
Kumar P; UGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore 452 001, India.
Gupta M; UGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore 452 001, India.
Ganguli T; Synchrotrons Utilization Section, Raja Ramanna Centre for Advanced Technology, Indore 452013, India.
Rai SK; Synchrotrons Utilization Section, Raja Ramanna Centre for Advanced Technology, Indore 452013, India.

J Synchrotron Radiat ; 26(Pt 3): 793-800, 2019 May 01.

Article em En | MEDLINE | ID: mdl-31074444

Palavras-chave

X-ray multilayers; boron carbide; composition; extreme ultraviolet lithography; optical index; resonant reflectivity

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Índia

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Índia