Performance analysis of a silicon NOEMS device applied as an optical modulator based on a slot waveguide.

In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and micro-opto-electro-mechanical system (MOEMS) approach for modulation.