A synergistic interplay between dopant ALD cycles and film thickness on the improvement of the ferroelectricity of uncapped Al:HfO<sub>2</sub>nanofilms.

A synergistic interplay between dopant ALD cycles and film thickness on the improvement of the ferroelectricity of uncapped Al:HfO₂nanofilms.

Yao, Lulu; Liu, Xin; Cheng, Yonghong; Xiao, Bing.

Afiliação

Yao L; Center of Nanomaterials for Renewable Energy (CNRE), State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, 710049 Xi'an, People's Republic of China.
Liu X; Center of Nanomaterials for Renewable Energy (CNRE), State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, 710049 Xi'an, People's Republic of China.
Cheng Y; Center of Nanomaterials for Renewable Energy (CNRE), State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, 710049 Xi'an, People's Republic of China.
Xiao B; Center of Nanomaterials for Renewable Energy (CNRE), State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, 710049 Xi'an, People's Republic of China.

Nanotechnology ; 32(21)2021 Mar 05.

Article em En | MEDLINE | ID: mdl-33601350